数字微镜阵列微立体光刻系统光路仿真与应用  

Optical Path Simulation and Applications of Micro Stereolithograph System Based on Digital Micromirror Device

作　　者：武传祥 蔡树向 杨文广 WU Chuan-xiang;CAI Shu-xiang;YANG Wen-guang(School of Electromechanical and Automotive Engineering,Y antai University,Yantai 264005,China)

机构地区：[1]烟台大学机电汽车工程学院,山东烟台264005

出　　处：《烟台大学学报（自然科学与工程版）》2022年第3期351-356,共6页Journal of Yantai University(Natural Science and Engineering Edition)

基　　金：国家自然科学基金资助项目(61803323);山东省自然科学基金资助项目(ZR2019BF049)。

摘　　要：提出了一种基于数字微镜阵列的微立体光刻系统,并在COMSOL Multiphysics软件中进行了系统光路的建模与仿真。在分析微立体光刻系统的技术原理与组成元件基础上,建立了微立体光刻系统的完整光路仿真模型。最后,搭建了一套基于数字微镜阵列的微立体光刻系统,实现了水凝胶的个性化定制加工以及批量动态制造。A micro stereolithography system based on digital micromirror device is proposed, and the optical path of the system is modeled and simulated using COMSOL Multiphysics software. After analyzing the technical principle and components of the micro stereolithography system, a complete optical path simulation model of the micro stereolithography system is established. Finally, a set of micro stereolithography system based on digital micromirror device is built to realize the customized processing and batch dynamic manufacturing of the hydrogel.

关 键 词：数字光刻 微纳制造 光路设计 数字微镜阵列 

分 类 号：TP29[自动化与计算机技术—检测技术与自动化装置]