基于SOPC的检焦图像实时处理系统设计  

Design of real-time processing system of focus detection image based on SOPC

作　　者：赵子豪 骆冬根 路美娜[1,3] 罗环 赵鑫鑫 雷雪枫 Zhao Zihao;Luo Donggen;Lu Meina;Luo Huan;Zhao Xinxin;Lei Xuefeng(Anhui Institute of Optics and Fine Mechanics,Hefei Institutes of Physical Science,Chinese Academy of Science,Hefei 230031,China;University of Science and Technology of China,Hefei 230026,China;Key Laboratory of Optical Calibration and Characterization of Chinese Academy of Science,Hefei 230031,China)

机构地区：[1]中国科学院合肥物质科学研究院安徽光学精密机械研究所,合肥230031 [2]中国科学技术大学,合肥230026 [3]中国科学院通用光学定标与表征技术重点实验室,合肥230031

出　　处：《电子测量技术》2022年第9期31-37,共7页Electronic Measurement Technology

基　　金：王宽诚率先人才计划“卢嘉锡国际合作团队项目”(GJTD-2018-15)资助。

摘　　要：针对投影式光刻机检焦系统对图像处理强实时性的需求,以FPGA芯片为载体,设计了一种基于SOPC的检焦图像实时处理系统。首先,使用Microblaze嵌入式软核执行图像处理算法,无需更改硬件架构即可进行系统方案验证和算法调试;然后,采用软硬件协同的方案,将算法移植到FPGA硬件中,实现了检焦流程的加速。FPGA片内通过AXI总线进行软硬件间数据交互,片外通过光纤接口与工件台互连,完成检焦结果的高速上传。实验结果表明,系统运行稳定,完成整个检焦流程需要104μs,软硬件协同实现速度约为软核实现的1 700倍。Aiming at the strong real-time demand of image processing in the focus detection system of projection lithography machine, a focus detection image real-time processing system based on SOPC is designed with FPGA chip as the carrier. Firstly, the Microblaze embedded soft core is used to execute the image processing algorithm, and the system scheme verification and algorithm debugging can be carried out without changing the hardware architecture. Then, using the scheme of software and hardware cooperation, the algorithm is transplanted to FPGA hardware to accelerate the focus detection process. The FPGA chip carries out data interaction between software and hardware through Axi bus, and the off chip is interconnected with the worktable through optical fiber interface to complete the high-speed upload of focus detection results. The experimental results show that the system runs stably, and it takes 104 μs to complete the entire focus detection process, and the software-hardware collaboration is about 1 700 times faster than the soft-core implementation.

关 键 词：检焦 图像处理 SOPC MICROBLAZE 软硬件协同 AXI总线 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置]