虚拟样机技术在真空镀膜机设计中的应用  

Application of Virtual Prototype Technology in the Design of Vacuum Coating Machine

作　　者：金昌度 JIN Changdu(Shanghai Beibo Coating Technology Industry Co.,Ltd.,Shanghai 201600)

机构地区：[1]上海北玻镀膜技术工业有限公司,上海201600

出　　处：《现代制造技术与装备》2022年第4期118-120,共3页Modern Manufacturing Technology and Equipment

摘　　要：现阶段,磁控溅射镀膜机广泛应用于工业镀膜。工业应用对薄膜参数要求不断提高,但由于国内镀膜机设计采用传统模式,主要结合大量经验公式进行设计,导致设计周期较长,无法满足镀膜机的应用需求。为解决上述问题,研究虚拟样机技术在镀膜机中的应用。虚拟样机技术基于产品的计算机仿真模型设计方法,能够使产品设计者与制造者在虚拟环境中对虚拟产品原型进行优化设计,对提高设计质量具有重要意义。通过介绍虚拟样机技术建立了镀膜机生产机械设计生命周期模型,可为实施镀膜机样机虚拟样机设计提供理论依据。At this stage, magnetron sputtering coating machine is widely used in industrial coating, and the requirements for film parameters in industrial application are increasing. However, due to the traditional mode adopted in the design of domestic coating machine and mainly combined with a large number of empirical formulas, the design cycle is long and can not meet the application requirements of coating machine. In order to solve the above problems, the application of Virtual Prototype Technology in coating machine is studied. Virtual prototype technology is a product based computer simulation model design method, which can enable product designers and manufacturers to optimize the virtual product prototype in the virtual environment, and is of great significance to improve the design quality. By introducing the virtual prototype technology, the life cycle model of production machinery design of coating machine is established, which provides a theoretical basis for the implementation of virtual prototype design of coating machine prototype.

关 键 词：虚拟样机技术 真空镀膜机 仿真模型 

分 类 号：TB756[一般工业技术—真空技术]