湿法刻蚀液配比对“SE+PERC”双面单晶硅太阳电池电性能影响的研究  

INFLUENCE OF WET ETCHING SOLUTION PROPORTION ON ELECTRICAL PROPERTIES OF“SE+PERC”BIFACIAL MONO-Si SOLAR CELLS

作　　者：张进臣 张建军 张永 严金梅 朱少杰 Zhang Jinchen;Zhang Jianjun;Zhang Yong;Yan Jinmei;Zhu Shaojie(JA Solar Co.,Ltd.,Xingtai 055550,China)

机构地区：[1]晶澳太阳能有限公司,邢台055550

出　　处：《太阳能》2022年第7期53-58,共6页Solar Energy

摘　　要：在太阳电池制备过程中,刻蚀工序作为扩散工序后去除硅片p-n结的重要工序,除了具有将p区与n区断开防止正负极短路的作用外,还会对硅片背面绒面的状态产生影响,尤其是此工序后续还会影响“SE+PERC”双面单晶硅太阳电池的电性能。湿法刻蚀工艺中刻蚀液的配比不同,对抛光后硅片背面的绒面形貌产生的影响也会不同,从而会影响太阳电池对不同波段太阳光的利用率,导致制备的“SE+PERC”双面单晶硅太阳电池的光电转换效率存在差异。研究了湿法刻蚀工艺中不同刻蚀液配比条件下硅片背面的绒面形貌及反射率的变化规律,通过优化刻蚀液配比达到刻蚀后硅片背面绒面形貌及反射率的最佳状态,最终实现“SE+PERC”双面单晶硅太阳电池的光电转换效率提升0.05%。In the solar cell preparation process,the etching process is an important process to remove the p-n junction of the silicon wafer after the diffusion process.In addition to having the function of disconnecting the p region from the n region to prevent the short circuit of the positive and negative electrodes,it will also affect the state of the rear surface texture of the silicon wafer,especially this process will also affect the electrical properties of“SE+PERC”bifacial mono-Si solar cells.Different proportions of etching solutions in the wet etching process will have different effects on the textured morphology of the rear surface of the silicon wafer after polishing,which will affect the utilization of solar cells for different wavelengths of sunlight,resulting differences in the photoelectric conversion efficiency of the prepared“SE+PERC”bifacial mono-Si solar cells.In this paper,the variation law of the textured morphology and the reflectivity of the rear surface of the silicon wafer under the conditions of different etching solution proportions in the wet etching process is studied.The best state of textured morphology and reflectivity after etching is achieved,and the photoelectric conversion efficiency of“SE+PERC”bifacial mono-Si solar cells is finally increased by 0.05%.

关 键 词：单晶硅太阳电池 湿法刻蚀 PERC 背面抛光 反射率 光电转换效率 

分 类 号：TK514[动力工程及工程热物理—热能工程]