二元锰钒氧化物薄膜的制备及室温铁磁性研究  

Study on the Preparation and Room-Temperature Ferromagnetic of Binary Manganese-Vanadium Oxide Thin Films

作　　者：王婉平 刘凯[1] 田建军[1] 刘献省[1] 康朝阳 WANG Wanping;LIU Kai;TIAN Jianjun;LIU Xiansheng;KANG Chaoyang(Henan Key Laboratory of Photovoltaic Materials,Henan University,Kaifeng 475004,China)

机构地区：[1]河南大学光伏材料省重点实验室,开封475004

出　　处：《真空科学与技术学报》2022年第6期442-447,共6页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(No.11405045)。

摘　　要：本工作采用磁控溅射技术在蓝宝石衬底上制备了钒氧化物(VO_(x))磁性薄膜,研究了共沉积Mn元素对VO_(x)表面形貌及铁磁性的影响。结构与形貌表征结果表明:本文制备的VO_(x)薄膜是一种化学计量比在V_(2)O_(3)与VO_(2)之间的纯相钒氧化物薄膜,Mn元素的引入使VO_(x)晶格发生轻微畸变,并且导致VO_(x)的形貌由纳米棒状结构演化为球状;磁学性能结果表明:VO_(x)薄膜呈现出室温铁磁性,随着Mn元素含量的增加,薄膜的饱和磁矩先增大后减小,Mn元素与V元素比例为1∶1时,表面形貌最规则且具有最大饱和磁矩345 emu/cm^(3)。In this work, magnetic vanadium oxide(VO_(x)) thin films were prepared on sapphire substrates by RF magnetron sputtering. The effects of codeposition of Mn on the surface morphology and ferromagnetism of VO_(x)were investigated. The results of structure and morphology characterization show that the VO_(x)film prepared by us is a kind of pure vanadium oxide film with a stoichiometric ratio between V_(2)O_(3)and VO_(2). The introduction of Mn element causes slight distortion of VO_(x)lattice, and the morphology of VO_(x)evolves from a nano-rod structure to a spherical structure. The results of magnetic properties show that VO_(x)films exhibited room-temperature ferromagnetic properties. With the ratio of Mn to V being 1:1, the saturation magnetic moment of the film first increases and then decreases. When the Mn content is 30%, the surface morphology is the most regular, and the maximum saturation magnetic moment is 345 emu/cm^(3).

关 键 词：磁控溅射 钒氧化物薄膜 纳米结构 室温铁磁性 

分 类 号：O484.5[理学—固体物理]