氟化钙抛光加工工艺及进展  

Polishing Process and Progress of Calcium Fluoride

作　　者：彭云峰 杨磊 刘晓阳 PENG Yunfeng;YANG Lei;LIU Xiaoyang(Xiamen University,Xiamen 361005,China;Shenzhen Research Institute of Xiamen University,Shenzhen 518000,China;Beijing Scitlion Technology Co.,Ltd.,Beijing 101111,China)

机构地区：[1]厦门大学航空航天学院,厦门361005 [2]厦门大学深圳研究院,深圳518000 [3]北京首量科技股份有限公司,北京101111

出　　处：《航空制造技术》2022年第13期14-25,共12页Aeronautical Manufacturing Technology

基　　金：国家自然科学基金项目(52075463);深圳市科技计划项目(JCYJ20210324122001003)。

摘　　要：氟化钙(Calcium fluoride,CaF_(2))晶体是一种非常重要的光学晶体,因其具备高透射率和良好的长期辐射稳定性被广泛应用于光学仪器中。随着光刻技术向较短波长的发展,CaF_(2)更是成为极紫外光刻物镜的首选材料。CaF_(2)是一种典型的脆性材料,断裂韧性很低,一般通过抛光加工制成CaF_(2)光学表面,所以其抛光加工技术与工艺尤其重要。总结了CaF_(2)的主要加工方法、工艺及研究成果,介绍了其粗加工阶段所涉及的超精密切削和固结磨料研磨方法;重点从超精密抛光这一方面,较全面地概述了浮法抛光、化学机械抛光、固结磨料抛光、磁流变抛光、振动辅助固结磨料抛光和离子束抛光等抛光方法的原理及进展,并对以上加工方法进行对比;最后,对CaF_(2)抛光加工技术的未来发展方向做了初步展望。希望能为CaF_(2)加工领域后续深入研究提供参考。Calcium fluoride(CaF_(2))crystal is a very important optical crystal.It is widely used in optical instruments because of its high transmittance and good long-term radiation stability.Especially with the development of lithography technology to shorter wavelength,CaF_(2)has become the preferred material for extreme UV lithography objective.CaF_(2)is a typical brittle material with low fracture toughness.CaF_(2)optical surface is usually made by polishing,therefore,the polishing technology and process are very important.This paper summarizes the main machining methods,processes and research results of CaF_(2),and introduces the ultra precision cutting and consolidated abrasive grinding methods involved in its rough machining stage;Paying more attention to ultra precision polishing,this paper comprehensively summarizes the principle and progress of float polishing,chemical mechanical polishing,fixed abrasive polishing,magnetorheological polishing,vibration assisted fixed abrasive polishing and ion-beam polishing,and the related processing methods mentioned are compared;Finally,the future development direction of CaF_(2)polishing technology is prospected.It aims to provide valuable reference for further research in the field of CaF_(2)processing.

关 键 词：氟化钙(CaF_(2)) 脆性材料 光学元件加工 超精密加工 抛光技术 

分 类 号：TQ132.32[化学工程—无机化工] O734[理学—晶体学]