高灵敏纸基无湿敏材料电容式湿度传感器  

Highly Sensitive Paper-based Capacitive Humidity Sensor Without Humidity Sensitive Material

作　　者：程子豪 宋智[2] 夏雨人 薛严冰[1] CHENG Zi-hao;SONG Zhi;XIA Yu-ren;XUE Yan-bing(School of Automation and Electrical Engineering,Dalian Jiaotong University,Dalian 116028,China;School of Computer and Communication Engineering,Dalian Jiaotong University,Dalian 116028,China)

机构地区：[1]大连交通大学自动化与电气工程学院,辽宁大连116028 [2]大连交通大学计算机与通信工程学院,辽宁大连116028

出　　处：《仪表技术与传感器》2022年第6期18-22,共5页Instrument Technique and Sensor

基　　金：辽宁省教育厅科学研究项目(JDL2019008);辽宁省自然科学基金项目(2019ZD0107)。

摘　　要：为了拓宽湿度传感器的应用范围,兼顾其可穿戴、低成本、高灵敏度等优点,提出了一种电容式纸基无湿敏材料湿度传感器。以叉指电极(interdigital electrode,IDE)为基本结构,利用有限元仿真软件COMSOL Multipysics仿真研究了IDE指数对传感器性能的影响,得到具有良好湿敏特性的传感器结构。利用丝网印刷工艺制作电容式纸基湿度传感器,进行湿敏特性测试,系统研究了纸基类型、工作频率对传感器性能的影响,验证了其工艺一致性、重复性和长期稳定性。实验结果表明:以柯达相纸为基底的20指IDE传感器在1 V/200 Hz的测试电压下具有高达7379%的灵敏度、响应/恢复时间为108 s/131 s,表现出良好的重复性和长期稳定性。In order to broaden the application range of humidity sensors,taking into account the advantages of wearability,low cost,and high sensitivity,a capacitive paper-based humidity sensor without humidity sensitive materials was proposed.Taking interdigital electrode(IDE)as the basic structure,the finite element simulation software COMSOL Multipysics was used to simulate the influence of IDE index on the sensor performance,and a sensor structure with good humidity sensitivity was obtained.The capacitive paper-based humidity sensor was fabricated by the screen printing process,and the humidity sensitivity characteristics were tested.The influence of paper-based type and operating frequency on the performance of the sensor was systematically studied,and its process consistency,repeatability and long-term stability were verified.Experimental results show that the 20-finger IDE sensor based on Kodak photo paper has a sensitivity of up to 7379%under a test voltage of 1 V/200 Hz,and a response/recovery time of 108 s/131 s,showing good repeatability and long-term stability.

关 键 词：电容式湿度传感器 有限元仿真 纸基底 叉指电极 无湿敏材料 湿敏特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]