百瓦级近衍射极限VCSEL泵浦激光器  

Hundred-watt level VCSEL-pumped laser with near diffraction limit beam quality

作　　者：李雪鹏 杨晶[1,3] 筵兴伟 陈中正 袁磊[1,3] 杨俊波 王小军[1,3] 彭钦军 许祖彦 Li Xuepeng;Yang Jing;Yan Xingwei;Chen Zhongzheng;Yuan Lei;Yang Junbo;Wang Xiaojun;Peng Qinjun;Xu Zuyan(Key Laboratory of Solid State Laser,Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing 100190,China;University of Chinese Academy of Sciences,Beijing 100190,China;QiluZhongke Institute of Optical Physics and Engineering Technology,Jinan 250000,China;College of Liberal Arts and Sciences,National University of Defense Technology,Changsha 410073,China)

机构地区：[1]中国科学院理化技术研究所,中国科学院固体激光重点实验室,北京100190 [2]中国科学院大学,北京100190 [3]齐鲁中科光物理与工程技术研究院,济南250000 [4]国防科技大学文理学院,长沙410073

出　　处：《强激光与粒子束》2022年第8期23-28,共6页High Power Laser and Particle Beams

摘　　要：报道了高功率、高光束质量的垂直腔面发射半导体激光器(VCSEL)侧泵的Nd:YAG激光振荡器。从VCSEL泵浦源的主动冷却的热沉结构出发,设计了5个227 W的VCSEL线阵,并且通过优化侧面泵浦大口径激光棒的结构,研制成了具备480 W输出能力的棒状激光模块,相应的光-光效率为49.7%。在此基础上,设计了一种高功率、高光束质量的VCSEL侧面泵浦棒状Nd:YAG激光振荡器。腔内插入望远镜光学元件,并通过优化各光学元件的参数使其工作在热近非稳区域,以达到增大基横模体积和抑制高阶横模目的。最终,获得114 W的输出功率,相应的平均光束质量因子M^(2)为1.42。由于VCSEL具备优秀的波长-温度稳定性,这种高功率、高光束质量的VCSEL泵浦的固体激光器在工业、空间等领域,具有极为广阔的应用前景。A high power high beam quality vertical-cavity surface-emitting laser(VCSEL)side-pumped rod Nd:YAG laser oscillator is demonstrated.Based on the macro-channel optimization of the active heat sink for the VCSEL pump source,five 227 W VCSEL linear arrays are manufactured.By optimizing the structure of the sidepumped diffuse chamber,a rod laser module with an output capacity of 480 W and 49.7%optical-to-optical efficiency is developed.Accordingly,a telescopic module is introduced in the laser oscillator to realize a large fundamental mode volume,and thermal-near-unstable parameters is further optimized to suppress higher transversal modes.Finally,an output power of 114 W is obtained with an average beam quality factor M2 of 1.42,and the power variations are±0.9%over 200 s and±4.2%over the temperature range from 18℃to 26℃.To the best of our knowledge,this is the first time that a hundred-watt level and near diffraction limit beam quality laser is generated by VCSEL pumped scheme.Due to the excellent temperature stability of the VCSEL,this high-power and high beam quality solid-state laser has a promising competence in industry,space and other complicated environments.

关 键 词：垂直腔面发射半导体激光器 激光振荡器 近衍射极限光束质量 高功率 棒状激光器 

分 类 号：TN248.1[电子电信—物理电子学]