轻量化扇形X射线微孔器件研制及性能测试  

Development and Performance Test of Lightweight X-ray Micro Pore Optic with Sector

作　　者：徐昭[1] 顾燕[1] 姜博文 张振 黎龙辉 王健[1] 金戈[1] 张臣[2,3] 邱祥彪 李玉飞 吴超 杨晓明 贾振卿 赵冬华 宋淳 周新[1] 廖亦戴[1] 李婧雯 郭燕[1] 韩晓明 Xu Zhao;Gu Yan;Jiang Bowen;Zhang Zhen;Li Longhui;Wang Jian;Jin Ge;Zhang Chen;Qiu Xiangbiao;Li Yufei;Wu Chao;Yang Xiaoming;Jia Zhenqing;Zhao Donghua;Song Chun;Zhou Xin;Liao Yidai;Li Jingwen;Guo Yan;Han Xiaoming(North Night Vision Technology Co.,Ltd.,Nanjing 211106,Jiangsu,China;Key Laboratory of Space Astronomy and Technology,National Astronomical Observatories,Chinese Academy of Sciences,Beijing 100012,China;College of Astronomy and Space Science,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]北方夜视技术股份有限公司,江苏南京211106 [2]中国科学院国家天文台空间天文与技术重点实验室,北京100012 [3]中国科学院大学天文与空间科学学院,北京100049

出　　处：《光学学报》2022年第11期241-248,共8页Acta Optica Sinica

基　　金：国家自然科学基金(12003010);中国科学院战略性先导科技专项(XDA15310101-01)。

摘　　要：扇形X射线微孔器件(MPOS)是一种新型的X射线聚焦器件。相较传统微孔聚焦器件,其具有集成度高、轻量化等优势,在空间X射线探测方面具有应用前景。基于MPOS聚焦理论,设计并研制出MPOS聚焦器件,其微孔内壁粗糙度为0.4~0.5 nm,微孔排列精度约为5.5%。使用点对点X射线测试平台对器件的聚焦能力进行检测,结果表明,在工作电压为5.0 kV,电流为0.1 mA条件下,聚焦焦斑形貌为清晰的类六角星形,角分辨率为7.7′@1 keV。The X-ray micro pore optic with sector(MPOS) is a new type of X-ray focusing device. Compared with the traditional micro pore focusing devices, MPOS has application prospects in space X-ray detection with the advantages of high integration and lightweight. The MPOS focusing device is designed and developed based on the focusing theorem. The roughness of the inner wall of the micro pore is 0.4--0.5 nm, and the precision of array distribution is about 5.5%. The focusing performance of the device is tested with a point-to-point X-ray test platform. The results show that the focal spot shape is a clear hexagonal star, and the angular resolution is 7.7′@1 keV with operating voltage of 5.0 kV and current of 0.1 mA.

关 键 词：X射线光学 X射线微孔聚焦器件 扇形 轻量化 X射线聚焦 角分辨率 

分 类 号：O434.1[机械工程—光学工程]