芯片制造中的光学微纳加工技术前沿与挑战  被引量:1

The Frontiers and Challenges of Optical Micro-nano Fabrication Technology for Chip Fabrication

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作  者:蒲明博 李向平 张杨 郑美玲[3] 粟雅娟[4] 曹耀宇 曹暾 徐挺 段宣明 冯帅 孙玲 Pu Mingbo;Li Xiangping;Zhang Yang;Zheng Meiling;Su Yajuan;Cao Yaoyu;Cao Tun;Xu Ting;Duan Xuanming;Feng Shuai;Sun Ling(Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209;Institute of Photonic Technology,Jinan University,Guangzhou 511443;Technical Institute of Physics and Chemistry,Chinese Academy of Sciences,Beijing100190;The Institute of Microelectronics,Chinese Academy of Sciences,Beijing100029;School of Optoelectronic Engineering and Instrumentation Science,Dalian University of Technology,Dalian 116024;Modern College of Engineering and Applied Sciences,Nanjing University,Nanjing210033;Faculty of Information Sciences,National Natural Science Foundation,Beijing100085)

机构地区:[1]中国科学院光电所技术研究所,成都610209 [2]暨南大学光子技术研究院,广州511443 [3]中国科学院理化技术研究所,北京100190 [4]中国科学院微电子研究所,北京100029 [5]大连理工大学光电工程与仪器科学学院,大连116024 [6]南京大学现代工程与应用科学学院,南京210033 [7]国家自然科学基金委员会信息科学部,北京100085

出  处:《中国科学基金》2022年第3期460-467,共8页Bulletin of National Natural Science Foundation of China

摘  要:基于第282期“双清论坛”,本文分析了我国未来芯片及其制造技术发展面临的国际形势、技术挑战和发展趋势,回顾了光学微纳加工技术近年来与光学工程、物理学、电子科学与技术、仪器科学与技术、集成电路科学与工程等多个学科领域交叉取得的主要进展和成就,凝练了未来芯片制造中光学微纳加工技术亟需解决的基础科学问题,展望了光学微纳加工技术科学前沿,探讨了未来5~10年我国在该领域亟待关注的研究方向。Based on the 282 nd issue of “Shuangqing Forum”, this paper analyzes the international situation, technical challenges and development trends of the future chips and their fabrication technology in our country. The main progress and achievements in optical micro-nano fabrication technology in recent years are reviewed, with multidisciplinary research involving optical engineering, physics, electronic science and technology, instrument science and technology, integrated circuit science and engineering, etc. The basic scientific questions that need to be solved in optical micro-nano fabrication technology for future chip fabrication are summarized. Finally, this paper forecasts the scientific frontier of optical micro-nano processing technology and discusses the research direction in this field in our country in the next 5~10 years.

关 键 词:芯片制造 光学微纳加工 多学科交叉 基础研究 

分 类 号:TN405[电子电信—微电子学与固体电子学] O439[机械工程—光学工程]

 

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