GaN基高速蓝绿光光源的研究进展  

Research Progress of GaN-based High-speed Blue and Green Light Source

作　　者：李振浩 汪莱[1] 郝智彪[1] 罗毅[1] 孙长征[1] 韩彦军[1] 熊兵[1] 王健[1] 李洪涛[1] LI Zhenhao;WANG Lai;HAO Zhibiao;LUO Yi;SUN Changzheng;HAN Yanjun;XIONG Bing;WANG Jian;LI Hongtao(Beijing National Research Center for Information Science and Technology(BNRist),Department of Electronic Engineering,Tsinghua University,Beijing 100084,CHN)

机构地区：[1]清华大学电子工程系/北京国家信息科学技术研究中心,北京100084

出　　处：《半导体光电》2022年第3期405-429,共25页Semiconductor Optoelectronics

基　　金：国家重点研发计划项目(2021YFA0716400);国家自然科学基金项目(62150027,61975093,61991443,61927811,61875104)。

摘　　要：随着射频通信频谱资源的逐渐饱和,局域范围内高速通信亟需开辟一条新的赛道,而可见光通信得益于光的大带宽本质和通信范围有限而频谱免许可,是传统通信的理想补充之一。GaN基蓝绿光发光光源近十年来的快速发展,特别是性能优良的小尺寸高速光源micro-LED的发展,使其成为“万物互联”的物联网时代终末端通信的重要促进力量。文章分蓝绿光micro-LED和带有谐振腔的GaN基蓝绿光光源(含超辐射发光二极管和激光器)两个主要类别,回顾了蓝绿光高速光源的发展历程和最新进展,主要包括micro-LED结构与阵列、面发射腔增强光源、边发射腔增强光源三个方面。With the gradual saturation of the spectrum resources of radio frequency communication,there is an urgent need to open up a new race track for local high-speed communication,while visible light communication benefits from the nature of large bandwidth and spectrum license-free since limited communication range,which is one of the ideal supplements of traditional communication.The rapid development of GaN-based blue-green light source in the past decade,especially the development of micro-LED as the small size and high speed light source with excellent performance,has made it an important driving force for terminal communication in the"Internet of Everything"era of Internet of Things.In this paper,the development history and recent progress of blue-green high-speed light sources are reviewed from two main categories:blue-green micro-LED and GaN-based blue-green light sources with resonators(including super-luminescent diodes and lasers).It mainly includes three aspects:micro-LED structure and array,surface emitting cavity enhanced light source and edge emitting cavity enhanced light source.

关 键 词：光通信 氮化镓 高速 micro-LED 谐振腔 

分 类 号：TN929.11[电子电信—通信与信息系统]