四谱段TDICCD图像传感器的设计与制作  

Design and Fabrication of Four Spectral TDICCD Image Sensor

作　　者：徐道润[1] 刘业琦 袁安波[1] 廖乃镘[1] 曲鹏程[1] 罗春林[1] 张晓琴 XU Daorun;LIU Yeqi;YUAN Anbo;LIAO Naiman;QU Pengcheng;LUO Chunlin;ZHANG Xiaoqin(Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN)

机构地区：[1]重庆光电技术研究所,重庆400060

出　　处：《半导体光电》2022年第3期547-551,共5页Semiconductor Optoelectronics

摘　　要：设计并研制了一种四谱段时间延迟积分电荷耦合器件(TDICCD)图像传感器,器件将四个TDICCD集成在同一芯片上,通过在光窗对应位置上镀不同的窄带滤光膜实现多谱段分光。该TDICCD图像传感器的像元尺寸为28μm×28μm,水平寄存器的有效像元数为3072元,行频为10 kHz,电荷转移效率高达0.99999,饱和输出电压为2650 mV,抗弥散能力大于等于100倍,动态范围为7143∶1。A kind of four spectral time-delay-integrated charge coupled device(TDI CCD)is designed and fabricated by integrating four TDICCDs on one chip.Different narrow-band filter films are plated on the corresponding positions of the light window to realize multi-band light splitting.For the designed TDICCD,its pixel size is 28μm×28μm,the horizontal pixel size is 3072 elements,the line frequency is 10 kHz,the charge transfer efficiency is 0.99999,the saturation output voltage is 2650 mV,the anti-blooming ability is more than 100×,and the dynamic range is 7143∶1.

关 键 词：时间延迟积分 四谱段 电荷耦合器件 图像传感器 

分 类 号：TN386[电子电信—物理电子学]