稳态微聚束加速器光源  

Steady-state micro-bunching accelerator light source

作　　者：唐传祥[1] 邓秀杰 Tang Chuan-Xiang;Deng Xiu-Jie(Department of Engineering Physics,Tsinghua University,Beijing 100084,China)

机构地区：[1]清华大学工程物理系,北京100084

出　　处：《物理学报》2022年第15期74-88,共15页Acta Physica Sinica

基　　金：清华大学自主科研专项(批准号:20191081195);国家自然科学基金(批准号:12035010)资助的课题。

摘　　要：稳态微聚束(steady-state micro-bunching,SSMB)原理采用激光操控储存环中的电子,可形成具有精微纵向/时间结构的电子束团,即微聚束.通过有机结合微聚束辐射的强相干特性以及储存环内电子束的高回旋频率特性,SSMB光源可提供高平均功率、窄带宽的相干辐射,波段可覆盖从太赫兹到软X射线,具有巨大的科学及产业应用前景.本文在对现有加速器光源—同步辐射光源和自由电子激光简要介绍的基础上,对SSMB的概念及潜力、原理验证实验进展、核心物理及关键技术挑战、清华SSMB-EUV光源方案及其对科学研究和芯片光刻潜在的变革性影响进行总结论述.所综述的工作是在我国自己创新性工作基础上进行的,对于国内读者了解该领域的工作及发展具有一定的帮助.Based on the laser manipulation of electron beam,the steady-state micro-bunching(SSMB) mechanism promises an electron bunch length six orders of magnitude smaller than that in a conventional storage ring.With the combination of the strong coherent characteristic of the radiation from micro-bunching and the high repetition rate of a storage ring,high-average-power,narrow-band coherent radiation with wavelengths ranging from THz to soft X-ray can be expected from an SSMB ring.Such a novel light source can provide unprecedented opportunities for accelerator photon science and industry applications like extreme ultraviolet(EUV) lithography.In this paper,the SSMB concept and its potential,the progress of SSMB proof-of-principle experiment,the key physics issues and technical challenges of an SSMB ring,the Tsinghua SSMB-EUV light source and its potential revolutionary influence on scientific research and EUV lithography are all reviewed.Some important results of the SSMB research achieved by us are also presented.

关 键 词：加速器光源 稳态微聚束 原理验证实验 极紫外光刻 

分 类 号：TL50[核科学技术—核技术及应用]