大质量数四极质谱计技术研究  

Development of Large Mass Number Quadrupole Mass Spectrometer

作　　者：陈联[1] 冯天佑[1] 王海斌[2] 王星辉 邱云涛 郭文 赵澜[1] 成永军[1] CHEN Lian;FENG Tianyou;WANG Haibin;WANG xinghui;QIU Yuntao;GUO Wen;ZHAO Lan;CHENG Yongjun(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;Unit 92609 of the Chinese People’s Liberation Army,Beijing 100077,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000 [2]中国人民解放军92609部队,北京100077

出　　处：《真空与低温》2022年第4期484-489,共6页Vacuum and Cryogenics

基　　金：中央引导地方科技发展资金项目(YDZX20216200003442)。

摘　　要：大质量数四极质谱计主要用于密闭有人环境中微量有毒、有害气体的检测。基于质量数范围1~1024 amu、绝对分辨本领1 amu的需求,进行了大质量数四极质谱计关键参数设计分析,完成了总体方案设计和测试分析。测试结果表明,该四极质谱计的质量数范围覆盖1~1024 amu的设计参数,最佳分辨本领可以达到1 amu以下。Large mass number quadrupole mass spectrometer is mainly used for the detection of the trace toxic and harmful gases,and is one of the main analytical methods to ensure the safety of workers in closed environment.The article introduces the key parameters design analysis and the overall scheme design based on the design requirement of 1 to 1024 amu molecular mass and 1amu mass resolution.The designed quadrupole mass spectrometer consists of two parts:analyzer and controller.At present,we have completed the development of the desktop principle prototype and the detailed design of the initial prototype.The test results show that mass rang covers the design index of 1 to 1024 amu,and the best mass resolution can be less than 1amu.

关 键 词：四极质谱计 质谱分析技术 微量气体检测 

分 类 号：TB774.3[一般工业技术—真空技术]