QMS101四极质谱计物理部分研制及适用性分析  

Development and Applicability Analysis of Physical Part of QMS101 Quadrupole Mass Spectrometer

作　　者：冯天佑[1] 陈联[1] 王星辉 邱云涛 郭文 吴成耀 李玉成 成永军[1] FENG Tianyou;CHEN Lian;WANG Xinghui;QIU Yuntao;GUO Wen;WU Chengyao;LI Yucheng;CHENG Yongjun(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 73000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2022年第4期490-496,共7页Vacuum and Cryogenics

基　　金：国家自然科学基金(61901203)。

摘　　要：针对四极质谱计国产化需求,研制QMS101型四极质谱计。该质谱计物理部分为90°离轴结构,采用轴向敞开式EI型离子源,四极杆长度203.2 mm,场半径4.157 mm,配备了法拉第板和微通道板型电子倍增器(MCP)两种检测器,其中电子倍增器90°离轴安装。QMS101四极质谱计质量检测范围1~1040 amu,偏转电极工作下法拉第板和MCP均检测正常。四极滤质器出口到MCP表面的离子运动轨迹模拟和MCP增益衰减实验表明,MCP应用于四极质谱计应对离子聚焦和收集面积进行匹配。QMS101物理部分可作为一种通用型四极质谱计分析器,配备不同射频电源可覆盖大多数四极质谱计应用需求。According to the requirements of localization of quadrupole mass spectrometer,QMS101 quadrupole mass spectrometer had been developed.The physical part of QMS101 was a 90°off-axis structure.It was designed with an axial open EI source and the quadrupole was 203.2 mm long and the field radius was 4.157 mm.It was equipped with Faraday plate and microchannel plate(MCP),in which the MCP was installed 90°off-axis.The mass range of QMS101 was 1 to 1040 amu.Faraday and MCP were working normally under the operation of deflection electrode.Simulation of ion trajectories from quadrupole mass filter outlet to MCP surface and experimental of MCP gain attenuation show that the application of MCP in quadrupole mass spectrometer should match the ion focusing and collection area.The physical part of QMS101 can be used as a general quadrupole mass spectrometer analyzer.Equipped with different RF power supplies,it can cover most application requirements of quadrupole mass spectrometer.

关 键 词：四极质谱计 90°离轴 微通道板 通用型分析器 

分 类 号：TB774.3[一般工业技术—真空技术]