一种带孔介电层结构柔性多维力传感器研究  

Flexible Multi⁃directional Force Sensor with Porous

作　　者：朱银龙[1,2] 吴杰 王旭 陈昕 王化明 ZHU Yinlong;WU Jie;WANG Xu;CHEN Xin;WANG Huaming(College of Mechanical and Electronic Engineering,Nanjing Forestry University Nanjing,210037,China;State key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences Shenyang,110169,China;College of Mechanical&Electrical Engineering,Nanjing University of Aeronautics and Astronautics Nanjing,210016,China)

机构地区：[1]南京林业大学机械电子工程学院,南京210037 [2]中科院沈阳自动化研究所机器人学国家重点实验室,沈阳110169 [3]南京航空航天大学机电学院,南京210016

出　　处：《振动．测试与诊断》2022年第4期764-770,829,共8页Journal of Vibration,Measurement & Diagnosis

基　　金：国家自然科学基金资助项目(51305209);江苏省高等学校自然科学研究资助项目(18KJA4600050,21KJB460010);江苏省“六大人才高峰”高层次人才资助项目(GDZB⁃024);机器人学国家重点实验室开放基金资助项目(2018⁃O16)。

摘　　要：针对智能机器人人机交互过程中存在的接触柔顺性和环境适应性问题,提出一种带孔结构的多维力柔性传感器的简单制备方法,采用碳纳米管/聚二甲基硅氧烷(carbon nanotubes/polydimethylsiloxane,简称CNTs/PDMS)混合制备柔性电极,以带孔结构的硅胶作为介电层,组装制备电容式柔性多维力传感器。建立柔性多维力传感器的数学模型,并通过试验获取柔性传感器的性能参数。试验结果表明:传感器理论模型与试验曲线吻合性较好,带孔结构的介电层能够提高传感器的灵敏度,法向上的检测范围为0~50 N,分辨率为0.05 N;切向上的检测范围为0~10 N,分辨率为0.15 N。将其安装在机器人手爪上进行了水果抓取试验,成功检测出水果抓取过程中的夹紧力,进一步表明该传感器具有较好的实用性。Soft sensor is an important device of human-computer interaction for robot.This work proposes a method to fabricate multi-directional force flexible sensors with porous structure in a simple and economic way.The flexible electrode is fabricated by mixing carbon nanotubes/polydimethylsiloxane(CNTs/PDMS),and the capacitive flexible multi-directional force sensor is assembled with porous silica gel as dielectric layer.The theoretical model of the flexible multi-directional force sensor is established and the performance parameters of the flexible sensor are obtained through experiments.The experimental results show that the theoretical model of the sensor agree well with the experimental curves.The dielectric layer with pore structure can improve the sensitivity of the sensor.The detection range of the sensor in the normal direction is 0~50 N and the resolution is 0.05 N.While the detection range in the tangential direction is 0~10 N and the resolution is 0.15 N.The sen⁃sor is integrated on an end-effector based on flexible pneumatic actuator for robotic fruit harvesting,and the hold⁃ing and grasping force in the fruit grasping process is successfully detected.It further shows that the proposed sensor has good practicability.

关 键 词：电容式传感器 柔性传感器 多维力觉 传感器建模 

分 类 号：TH823[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]