氮氩流量比对磁控溅射CrAgCeN涂层摩擦学性能的影响  

Effect of Nitrogen-to-argon Flow Ratio on Properties of CrAgCeN Coating by Magnetron Sputtering

作　　者：畅为航[1,2,3] 蔡海潮 薛玉君[1,4] 雷贤卿[1] 李航 CHANG Wei-hang;CAI Hai-chao;XUE Yu-jun;LEI Xian-qing;LI Hang(School of Mechatronics Engineering,Henan University of Science and Technology,Henan Luoyang 471003,China;Henan Key Laboratory for Machinery Design and Transmission System,Henan University of Science and Technology,Henan Luoyang 471003,China;Nanyang Institute of Technology,Henan Nanyang 473004,China;State Key Laboratory of Aviation Precision Bearing,Luoyang LYC Bearing Corporation,Henan Luoyang 471023,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003 [2]河南科技大学河南省机械设计及传动系统重点实验室,河南洛阳471003 [3]南阳理工学院,河南南阳473004 [4]洛阳LYC轴承有限公司航空精密轴承国家重点实验室,河南洛阳471023

出　　处：《表面技术》2022年第8期262-271,共10页Surface Technology

基　　金：国家重点研发计划(2021YFB3400401);河南省科技攻关项目(202102210073);国家国防基础科研计划项目(JCKY2018419C101)。

摘　　要：目的研究不同氮氩流量比对磁控溅射制备CrAgCeN涂层微观组织结构和摩擦学性能的影响。方法采用扫描电子显微镜、X射线衍射仪对涂层表面形貌、成分和微观组织进行分析。采用纳米压痕仪、球盘式摩擦磨损试验机和白光干涉三维形貌仪,测试涂层的力学性能和摩擦学性能。结果在给定的氮氩流量比下,CrAgCeN涂层主要有CrN、Cr_(2)N、Ag、AgN_(3)和Ce相构成,引入Ce、Ag可改变组织结构,随着氮氩流量比的增加,CrAgCeN涂层表面形貌由三角锥状转变为球状,在氮氩流量比为1.5时,涂层组织更加致密。涂层硬度和弹性模量随着氮氩流量比的增加呈现先升高后降低的趋势,在氮氩流量比为1.5时,硬度(H)和弹性模量(E)最大,分别为14.1 GPa和213.8 GPa;H/E值最高,为0.066,反映涂层具有较好的抗塑性变形能力。随着氮氩流量比的增加,摩擦因数和磨损率先减小后增大,在氮氩流量比为1.5时,涂层的摩擦因数和磨损率最小,分别为0.381和1.1×10^(-6) mm^(3)/(N·m),相比于氮氩流量比为0.6、1、3时,对磨球磨损表面能谱表明Ce、Ag含量最高,减摩耐磨效应最优,对磨球磨损表面最平整。结论通过调整氮氩流量比可以获得摩擦磨损性能良好的CrAgCeN涂层。It is an advanced surface modification technology by magnetron sputtering a several-micron-thick hard ceramic coating,which have been widely used in industry owing to their high hardness and toughness,good oxidation and corrosion resistance,wear resistance,and excellent adhesion to substrates.The coating performance is strongly affected by the deposition parameters such as applied pressure,N_(2)-gas partial pressure,and target power.A change in these parameters may alter the structural and mechanical properties and hence the friction resistance of the coating.The work aims to investigate the effect of nitrogen-to-argon flow ratios on the microstructure and tribological properties of CrAgCeN coatings prepared by magnetron sputtering.The sputtering targets were Cr(99.95%)and CeAg alloy(5:5 Ce:Ag),304 stainless steel was selected as the substrate.A Cr transition layer was deposited for 20 minutes to improve the adhesion of the coating to the substrate.The main process parameters were set as follows:vacuum pressure was 5×10^(−4)Pa,deposition temperature was 200°C,total coating-deposition time was 120 min.The nitrogen-to-argon flow ratio was 0.6,1,1.5 and 3.Scanning electron microscopy(SEM)and X-ray diffraction(XRD)were used to characterize the microstructure,composition and crystal structure of the coatings.The mechanical properties and friction and wear properties of the coatings were tested by nano indentation,tribometer and white light interfering profilometer.The wear rates of three tests were averaged to reduce the error,and were used to evaluate the wear performances of the coatings.A well-formed CrAgCeN coating is successfully prepared by a magnetron sputtering system on the surface of 304 steel.The key parameters were set as follows,deposition pressure was 0.6 Pa,DC power was 200 W,RF power was 60 W,N_(2) flow was 30 mL/min,Ar flow was 20 mL/min.The microstructure of CrAgCeN coatings could be improved by doping Ce.The phases of CrAgCeN coatings,are mainly composed of CrN,Cr_(2)N,Ag,AgN_(3) and Ce.With the

关 键 词：氮氩流量比 磁控溅射 CrAgCeN涂层 摩擦磨损 

分 类 号：TH117[机械工程—机械设计及理论]