不同轴承钢基体沉积Ti-GLC薄膜的高温摩擦学性能  

High Temperature Tribological Properties of Ti-GLC Films Deposited on Different Bearing Steel Substrates

作　　者：聂傲男 李迎春[1,2] 范恒华 毕明龙 邱明[1,2] 尹津龙 NIE Aonan;LI Yingchun;FAN Henghua;BI Minglong;QIU Ming;YIN Jinlong(School of Mechanical and Electrical Engineering,Henan University of Science and Technology,Luoyang 471003,China;Collaborative Innovation Center of Machinery Equipment Advanced Manufacturing of Henan Province,Henan University of Science and Technology,Luoyang 471003,China;Aero Engine Corporation of China(AECC)Harbin Bearing Co.,Ltd.,Harbin 150027,China;Teer Coatings Technology Co.,Ltd.,Birmingham,UK)

机构地区：[1]河南科技大学机电工程学院,洛阳471003 [2]河南科技大学机械装备先进制造河南省协同创新中心,洛阳471003 [3]中国航发哈尔滨轴承有限公司,哈尔滨150027 [4]英国Teer镀层科技有限公司,伯明翰英国

出　　处：《中国表面工程》2022年第2期187-195,共9页China Surface Engineering

基　　金：外专局引智资助项目(HNGD2020003)。

摘　　要：针对航空发动机主轴轴承服役工况恶劣和类石墨碳基薄膜在高温环境下的性能研究不足等问题,采用磁控溅射技术在不同轴承钢基体(M50钢、M50NiL钢和W9Cr4V2Mo钢)上沉积Ti-GLC薄膜,探究在不同温度下的摩擦学性能。采用SEM、Raman分析薄膜的微观结构,采用纳米压痕仪、划痕仪等测试其力学性能,利用MFT-5000型多功能摩擦磨损试验机测试所镀薄膜在不同温度下(室温、200℃、250℃和300℃)的摩擦学性能。结果表明:在三种不同轴承钢基体沉积的Ti-GLC薄膜,其硬度和弹性模量变化不大,结合力从大到小依次为M50>M50NiL>W9Cr4V2Mo。随着温度的升高,三种钢基体沉积Ti-GLC薄膜的摩擦因数均逐渐增大,而磨损率则先减小后增大,且表现出不同的磨损形式。三种轴承钢基体沉积Ti-GLC薄膜的最佳工作温度区间为室温~200℃,M50钢基体所镀薄膜具有更好的力学性能和摩擦学性能,其结合力达到80 N以上,300℃时的平均摩擦因数为0.125,磨损率仅为3.05×10^(−17) m^(3)/(N·m)。研究成果为类石墨碳基薄膜在高温环境下的实际应用奠定了理论基础。Aiming at the severe service conditions of aeroengine main shaft bearings and insufficient research on the performance of graphite-like carbon films in high temperature environments,Ti-GLC films are deposited on different bearing steel substrates(M50 steel,M50NiL steel and W9Cr4V2Mo steel)by magnetron sputtering to investigate the tribological properties at different temperatures.The microstructure of the film is analyzed by SEM and Raman.The mechanical properties of the films are evaluated by nanoindenter and scratch instrument.The tribological performance of the films is performed using MFT-5000 multi-functional tribometer.at room temperature,200℃,250℃and 300℃.The results show that the hardness and elastic modulus of Ti-GLC films deposited on three different bearing steel substrates have a little change,the order of adhesion strength from large to small is M50>M50NiL>W9Cr4V2Mo.With the increase of temperature,the friction factor of Ti-GLC films deposited on three kinds of steel substrates increases gradually,while the wear rate decreases first and then increases,and different wear mechanisms are shown.The optimum operating temperature range of Ti-GLC films deposited on three bearing steel substrates is in the range between room temperature to 200℃,the films deposited on M50 steel substrate have better mechanical and tribological properties,and its adhesion strength is above 80 N,the average friction factor at 300℃is 0.125,and the wear rate is only 3.05×10^(−17) m^(3)/(N·m).This paper provides a theoretical basis for the practical application of graphite-like carbon films in high-temperature environments.

关 键 词：磁控溅射 类石墨碳基薄膜 高温 摩擦学性能 

分 类 号：TH117[机械工程—机械设计及理论]