红外衍射光学模芯的超精密车削工艺与优化  

Ultra-Precision Turning Process and Optimization of Infrared Diffraction Optical Mold Insert

作　　者：隋博 霍富荣[1,2] 李闯[1,2] 杨超 薛常喜 Sui Bo;Huo Furong;Li Chuang;Yang Chao;Xue Changxi(School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China;Key Laboratory of Advanced Optical System Design and Manufacturing Technology of Universities of Jilin Province,Changchun University of Science and Technology,Changchun 130022,Jilin,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学先进光学设计与制造技术吉林省高校重点实验室,吉林长春130022

出　　处：《光学学报》2022年第13期92-98,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61905024);高等学校学科创新引智计划(D17017)。

摘　　要：为减小模芯的制造误差对模压成型的衍射光学元件(DOEs)光学性能的影响,对具有曲面基底衍射微结构表面的微晶铝合金模芯开展了单点金刚石车削(SPDT)工艺研究。基于遮挡效应和散射效应分析模芯制造误差对DOEs衍射效率的影响,建立刀具半径和刀具偏转角与衍射效率之间的数学关系模型,提出提高加工精度的优化方法。在该方法的指导下进行了衍射光学模芯车削实验,并对比预期衍射效率与实验结果。结果表明:采用该优化方法选择工艺参数能够减小模芯制造误差对衍射效率的影响,提高DOEs的光学性能,为SPDT衍射光学模芯制作提供参考。To reduce the effect of manufacturing error of mold inserts on the optical performance of molding diffractive optical elements(DOEs), single point diamond turning process of microcrystalline aluminum alloy mold inserts with a curved substrate diffractive microstructure surface is studied. Based on the shadowing effect and scattering effect, the influence of mold insert manufacturing error on the diffraction efficiency of DOEs is analyzed, a mathematical relationship model among the tool radius, tool deflection angle, and diffraction efficiency is established, and an optimization method for improving machining accuracy is proposed. The turning experiment of diffractive optical mold inserts is carried out under the guidance of the method, and the expected diffraction efficiency is compared with the experimental results. The results show that using process parameters obtained by the proposed method can reduce the influence of mold insert manufacturing error on diffraction efficiency and improve the optical performance of DOEs, which provides a reference for SPDT diffraction optical mold insert manufacturing.

关 键 词：测量 衍射微结构 金刚石车削 模芯 衍射效率 工艺参数 

分 类 号：O439[机械工程—光学工程]