Bionic MEMS for Touching and Hearing Sensations: Recent Progress, Challenges, and Solutions  

作　　者：Chang Ge Edmond Cretu 

机构地区：[1]Department of Electrical and Computer Engineering,The University of British Columbia,Vancouver,BC,V6T 1Z4,Canada

出　　处：《Journal of Bionic Engineering》2022年第3期590-615,共26页仿生工程学报（英文版）

摘　　要：This paper reviews the recent progress on bionic microelectromechanical systems(MEMS)used for touching and hearing sensations,focusing on the following three types of devices:MEMS tactile sensors,MEMS directional microphones,and MEMS vector hydrophones.After reviewing the electromechanical coupling principles,design,and performance of these MEMS devices,the authors conclude that it is vital for future research efforts in bionic MEMS to focus more on microfabrication technologies.The development of robust microfabrication flows is the basis to implement hybrid electromechanical coupling principles based on novel functional materials.High-quality polymeric micromachining technologies can also significantly enhance the potential of existing bionic MEMS designs for more practical applications.

关 键 词：Bionic MEMS Tactile sensor Directional microphone Vector hydrophone Polymeric micromachining PDMS SU-8 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]