时栅位移传感器误差动态采样与补偿模型研究  

Study on error dynamic sampling and compensation model of the time grating displacement sensor

作　　者：杨继森[1] 张迪 卢渝 吴灼 周润 Yang Jisen;Zhang Di;Lu Yu;Wu Zhuo;Zhou Run(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing UIniversity of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054

出　　处：《仪器仪表学报》2022年第6期9-18,共10页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(51205434,52175454);重庆市高等学校优秀人才支持计划项目;重庆理工大学研究生创新项目(clgycx 20203107)资助。

摘　　要：针对现有时栅位移传感器误差补偿模型补偿效果受标定实验台速度影响的问题,提出了一种基于三次样条插值-傅里叶谐波合成的误差补偿模型。首先,根据时栅位移传感器多测头信号感应原理与整周误差曲线等间距周期性分布特性,分析短周期误差受标定实验台速度影响,引入传感器等间距采样的“错位”误差,该误差将直接影响构建的短周期误差补偿模型的补偿效果;其次,利用三次样条插值法准确定位误差采样位置,精确重构短周期误差曲线;最后,通过重构的短周期误差曲线与傅里叶谐波补偿法建立了短周期误差补偿模型,提高了时栅位移传感器误差补偿效果。实验结果表明,采用本补偿模型后传感器短周期误差峰峰值降至1.7″;本补偿模型短周期误差补偿效果优于传统基于傅里叶谐波补偿法构建的补偿模型,标定实验台速度为3 r/min时补偿效果可提高56.0%,既能满足传感器动态标定的工作效率,也能满足传感器的高精度误差标定需求。The compensation effect of the current dynamic compensation model of the time grating displacement sensor is affected by the speed of calibration platform. To address this issue, an error compensation model based on cubic spline interpolation-Fourier harmonic compensation method is proposed. Firstly, the periodic distribution characteristics of multiple probe and whole cycle error curves of time grating displacement sensor are utilized. The short period error is affected by the speed of calibration platform, and the “dislocation” error is introduced. The dislocation error directly affects the compensation effect of the short period error compensation model. Secondly, the cubic spline interpolation method is used to locate the error sampling position accurately and reconstruct the short period error curve accurately. Finally, according to the reconstruction of short period error curve and the method of Fourier harmonic compensation short period error compensation model is established, the error compensation effect of time grating displacement sensor is improved. Experimental results show that the peak-to-peak value of short period error decreases to 1.7″ after using the compensation model. The compensation effect of short period error is better than the traditional compensation model based on Fourier harmonic compensation method. When the calibration platform rate is 3 r/min, the compensation effect can be increased by 56.0%. It cannot only meet the working efficiency of sensor dynamic calibration, but also meet the demand of sensor high-precision error calibration.

关 键 词：时栅位移传感器 误差补偿模型 三次样条插值 傅里叶谐波补偿 

分 类 号：TH712[机械工程—测试计量技术及仪器]