一种带有镂空图形的高性能微压电能量采集器  

High-Performance Micro-Piezoelectric Energy Harvester with Hollow Pattern

作　　者：张丽娟 王保志 董璇 张成功 赖丽燕 李以贵 Zhang Lijuan;Wang Baozhi;Dong Xuan;Zhang Chenggong;Lai Liyan;Li Yigui(School of Electrical and Electronic Engineering,Shanghai Institute of Technology,Shanghai 201418,China;School of Science,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海应用技术大学电气与电子工程学院,上海201418 [2]上海应用技术大学理学院,上海201418

出　　处：《微纳电子技术》2022年第7期649-656,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金青年基金项目(6210032321);上海市科技兴农重点攻关项目(沪农科创字(2018)第3-3号)。

摘　　要：设计了一种高平均应变量的单晶微压电能量采集器(PEH),通过热压键合、薄膜沉积等一系列加工工艺制备了PEH原型,利用振动激励机构和阻抗分析仪测试了其输出性能。实验结果得出,在1g加速度和52 Hz谐振频率的条件下,该PEH的峰值电压和功率密度分别为22.5 V和1.89μW/mm^(3)。通过有限元模拟了三种镂空图形(三角形、矩形和梯形)的力学和电学性能。结果表明,在1g加速度条件下,与未镂空的PEH相比,梯形镂空式PEH的谐振频率降低了24%,峰值电压提升了57%,平均应力增大了136%,实现了较佳的性能提升。A single-crystal micro-piezoelectric energy harvester(PEH)with high average strain was designed.The PEH prototype was fabricated through a series of processing techniques,such as thermocompression bonding,thin film deposition,etc.The vibration excitation mechanism and impedance analyzer were used to test its output performances.The experimental results show that under the conditions of 1g acceleration and 52 Hz resonant frequency,the peak voltage and power density of PEH are 22.5 V and 1.89μW/mm^(3),respectively.The mechanical and electrical properties of three hollow patterns(triangle,rectangle and trapezoid)were simulated by finite elements.The results show that under the condition of 1g acceleration,compared with the non-hollow PEH,the resonant frequency of the trapezoidal hollow PEH reduces by 24%,the peak voltage increases by 57%and the average stress increases by 136%,achieving the better performance improvement.

关 键 词：压电能量采集器(PEH) 悬臂梁 镂空 热压键合 薄膜沉积 

分 类 号：TM919[电气工程—电力电子与电力传动] TH703[机械工程—仪器科学与技术]