MPCVD法制备金刚石薄膜工艺研究  

Study onthe preparation technology of diamond film by MPCVD

作　　者：代晓南 白玲[1] 孙为云[1] 王晓燕 栗正新[2] 田艳媛[1] DAI Xiaonan;BAI Ling;SUN Weiyun;WANG Xiaoyan;LI Zhengxin;TIAN Yanyuan(Department of Materials Enginering,Zhengzhou Technical College,Zhengzhou 450100,China;School of Materials Science and Engineering,Henan University of Technology,Zhengzhou 450001,China)

机构地区：[1]郑州职业技术学院材料工程系,郑州450100 [2]河南工业大学材料科学与工程学院,郑州450001

出　　处：《超硬材料工程》2022年第2期36-40,共5页Superhard Material Engineering

基　　金：河南省科技攻关计划(212102210551)。

摘　　要：金刚石作为一种碳单质,是石墨、富勒烯及碳纳米管等的同素异形体。凭借其特殊的晶体结构,具有极低摩擦系数、热膨胀系数及极高硬度、导热性能、禁带宽度、声音传播速度等物理性能。文章综述了MPCVD法制备金刚石薄膜的机理及各表征方法的原理和用途,论述了MPCVD法制备金刚石薄膜工艺的研究进展,分别分析了气压、微波功率、气体流动方式、基体温度及氮掺杂等因素对沉积金刚石薄膜质量的影响。以上工艺参数对金刚石薄膜性能具有一定影响,在生产过程中需选择最佳参数以制备出质量较好的薄膜。最后论述了金刚石薄膜在生物医学领域的应用前景及目前亟待解决的技术难题。在钛合金表面涂覆一层金刚石薄膜可赋予钛合金高硬度、耐磨蚀等性能,且其具有良好的生物相容性,在生物医学领域将具有广阔的应用市场,但由于膜层内应力较大使得金刚石薄膜与基体结合较差,这也是目前亟待解决的问题。As an elemental carbon, diamond is an allotrope of graphite, fullerene and carbon nano tube. For the special crystal structure, it has very low friction coefficient, thermal expansion coefficient, very high hardness, thermal conductivity, band gap width, sound propagation speed and other physical properties. Diamond film has been widely used in recent years due to the high hardness, good wear resistance and morphology. In this paper, the mechanism of diamond film prepared by MPCVD and the principle and application of various characterization methods are reviewed. The research progress of MPCVD diamond film technology is also reviewed. The effects of gas pressure, microwave power, gas flow mode, substrate temperature and nitrogen doping on the quality of deposited diamond film are analyzed. The above technical parameters have a certain impact on the properties of diamond film. In the production process, the best parameters need to be selected to prepare for high-quality diamond film. Finally, the application prospect of diamond film in biomedical field and technical problems needed to be solved are discussed. Coating a layer of diamond film on the surface of titanium alloy can make titanium alloy with high hardness, wear resistance and other properties, and it has a good biocompatibility. There might be a broad application market in the biomedical field. However, due to the low internal stress of the film, the bonding between diamond film and matrix is poor, and it is also an urgent problem to be solved.

关 键 词：金刚石薄膜 气相沉积 工艺研究 生物医学 

分 类 号：TQ164[化学工程—高温制品工业] TG74[金属学及工艺—刀具与模具]