空气静压电主轴振动模糊控制技术研究  

Study on Fuzzy Control Technology of Vibration for Electro Spindle with Aerostatic Support

作　　者：于静 戴豪 YU Jing;DAI Hao(Beijing Semicore Microelectronics Equipment Co.,Ltd.,Beijing 100176,China)

机构地区：[1]北京烁科精微电子装备有限公司,北京100176

出　　处：《电子工业专用设备》2022年第3期52-55,共4页Equipment for Electronic Products Manufacturing

摘　　要：为提高空气静压电主轴运行稳定性,在引入小波阈值降噪方法的基础上,针对其振动面模糊控制技术进行研究。通过空气静压电主轴振动控制信号模糊量化处理、基于小波阈值降噪的电主轴振动信号虚假模态剔除、非模糊化精确控制量转换及控制比例因子输出,提出一种全新的电主轴振动模糊控制技术。实验结果表明,新的控制技术能够将电主轴的振动幅度控制在安全范围内,减少甚至避免了电主轴发生异常振动,提升了空气静压设备整体运行的稳定性。In order to improve the operation stability of aerostatic motorized spindle,based on the introduction of wavelet threshold denoising method,the fuzzy control technology of vibration surface is designed and studied.A new fuzzy control technology of motorized spindle vibration is proposed through fuzzy quantitative processing of motorized spindle vibration control signal of aerostatic support,false mode elimination of motorized spindle vibration signal based on wavelet threshold denoising,non fuzzy precise control quantity conversion and control scale factor output.The experimental results show that the new control technology can control the vibration amplitude of the motorized spindle within a safe range,reduce or even avoid the abnormal vibration of the motorized spindle,and then improve the overall operation stability of the aerostatic equipment.

关 键 词：小波阈值降噪 电主轴 静压支撑 模糊控制 

分 类 号：TH138.9[机械工程—机械制造及自动化]