基于涡旋光与平面波干涉的微位移测量  

Micro-displacement measurement based on interference of vortex beams and plane wave

作　　者：韩世泽 杨栋[2] 胡晓宁 杨忠明 庄新港 刘兆军[1] HAN Shize;YANG Dong;HU Xiaoning;YANG Zhongming;ZHUANG Xingang;LIU Zhaojun(School of Information Science and Engineering,Shandong University,Qingdao 266237,China;Key Laboratory of Laser&Infrared System,Shandong University,Qingdao 266237,China;The 41st Institute of CETC,Qingdao 266555,China)

机构地区：[1]山东大学信息科学与工程学院,山东青岛266237 [2]山东大学激光与红外系统集成技术教育部重点实验室,山东青岛266237 [3]中国电子科技集团公司第四十一研究所,山东青岛266555

出　　处：《光学精密工程》2022年第17期2058-2066,共9页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.62175131);山东省重点研发计划资助项目(No.2020CXGC010204);安徽省重点研究与开发计划资助项目(No.202104a04020001);山东大学基本科研业务费资助项目(No.2020JCG003)。

摘　　要：光学干涉测量技术得益于高灵敏性和高重复性常用于位移等几何量的高精度测量。为了实现纳米级位移精确测量,以涡旋光与平面波干涉模型为基础,建立并验证了花瓣状干涉图旋转角度与位移的线性关系,提出一种微位移测量方法。位移测量模型使用涡旋光束干涉光路,经仿真验证了原理的可行性,并搭建位移实验系统进行测量实验。实验结果表明,当位移量为200.0 nm时,测量结果为196.3 nm,误差为3.7 nm,误差百分比为1.9%,可实现纳米量级的微位移测量。与传统的球面波干涉、共轭涡旋光干涉等位移测量方案相比,该微位移测量方法在测量可靠性和测量精度方面均具有明显的优势。Owing to its high sensitivity and repeatability,optical interferometry is often used to measure geometric quantities,such as micro-displacement,with high accuracy.To achieve the accurate measurement of nanodisplacements,a linear relationship between the rotation angle of a petal-like interferogram and the displacement,was established and verified based on the interference of vortex beams and plane waves.A novel method of microdisplacement measurement was proposed,which used the structure of an interference system with vortex beams.The feasibility of the principle was verified by simulation,and a displacement experimental system was established for the measurement experiments.The experimental results show that when the displacement is 200.0 nm,the measurement result is 196.3 nm,with an error of3.7 nm or 1.9%,which can achieve microdisplacement measurement on a nanometer scale.Compared with traditional displacement measurement schemes,such as spherical wave interference and conjugate vortex beams interference,the proposed method has significant advantages in measurement reliability and accuracy.

关 键 词：干涉测量 涡旋光 微位移 平面波 

分 类 号：O439[机械工程—光学工程]