低温烧结压电陶瓷驱动器用材料特性研究  

Study on Properties of Low Temperature Sintered Piezoelectric Ceramic Material for Actuator

作　　者：张静 李正权[2] 褚涛 李慧琴 江平 郭亚雄 ZHANG Jing;LI Zhengquan;CHU Tao;LI Huiqin;JIANG Ping;GUO Yaxiong(China Zhenhua Xinyun Electrionic Components Co.,Ltd.,Guiyang 550025,China;Guizhou Zhenhua Hongyun Electronics Co.,Ltd.,Guiyang 550025,China;College of Materials and Metallurgy,Guizhou University,Guiyang 550025,China)

机构地区：[1]中国振华集团新云电子元器件有限责任公司,贵州贵阳550025 [2]贵州振华红云电子有限公司,贵州贵阳550025 [3]贵州大学材料与冶金学院,贵州贵阳550025

出　　处：《压电与声光》2022年第4期502-506,共5页Piezoelectrics & Acoustooptics

基　　金：贵阳市科技局基金资助项目([2021]1-16)。

摘　　要：以Pb(Ni_(1/3)Nb_(2/3))O_(3)-Pb(Zr_(0.41)Ti_(0.59))O_(3)(PNN-PZT)为基础体系,通过对烧结助剂x%CuO(质量比)和y%LiBiO_(2)(质量比)的质量进行调节,对陶瓷样品的相结构、微观组织形貌及电学性能进行了分析,阐述了助烧剂对陶瓷样品性能的影响。结果发现,在温度940~960℃下陶瓷烧结成瓷,且晶粒长大较充分。当x=0.2,y=1时,陶瓷样品的电学性能最优,即此时压电常数d_(33)=608 pC/N,机电耦合系数k_(p)=0.65,介电损耗tanδ=2.19%,介电常数ε_(r)=3843。采用烧结助剂质量比x=0.2,y=1的粉体制备7 mm×7 mm×36 mm的叠层压电驱动器,然后进行微观组织形貌和位移特性研究。叠层压电驱动器断面微观结构表明,电极层与陶瓷层粘接紧密,无裂缝或间隙产生。位移的测试结果表明,随着电压的增加,位移也在逐渐增加,在驱动电压为150 V时,其最大位移为46.280μm,位移增大的同时,迟滞逐渐降低。Using the Pb(Ni_(1/3)Nb_(2/3))O_(3)-Pb(Zr_(0.41)Ti_(0.59))O_(3)(PNN-PZT)as the basic system,the phase structure,microstructure and electric properties of PNN-PZT ceramic samples are analyzed by adjusting the mass of sintering aids CuO(x%)and LiBiO_(2)(y%)according to the mass ratio,and the effects of sintering aids on the ceramic samples are discussed.The results show that the ceramics are sintered into ceramics at 940-960℃,and the grain growth is more adequate.When x=0.2,y=1,the ceramic samples have optimal electric properties with piezoelectric constant d_(33) of 608 pC/N,electromechanical coupling coefficient k_(p) of 0.65,dielectric loss tanδ of 2.19%,and dielectric constant ε_(r) of 3843.A stacked piezoelectric actor with size of 7 mm×7 mm×36 mm is prepared by using the ceramic powders with the sintering aids mass ratio of x=0.2 and y=1,and its microstructure morphology and displacement characteristics are investigated.The cross-sectional microstructure of stacked piezoelectric actuator shows that the electrode layer was closely bonded to the ceramic layer and no cracks and gaps are created.The displacement test results show that with the increase of voltage,the displacement also gradually increases,and the maximum displacement is 46.280μm at 150 V.As the displacement increases,the hysteresis decreases gradually.

关 键 词：PNN-PZT 叠层压电陶瓷 烧结助剂 低温共烧 

分 类 号：TN609[电子电信—电路与系统]