基于显微拉曼的光学元件缺陷检测方法研究  

Research on optical component defect detection method based on micro-Raman

作　　者：戈畅 韩军[2] 吴飞斌[2] GE Chang;HAN Jun;WU Feibin(School of Electrical and Control Engineering,North University of China,Taiyuan 030051,China;Quanzhou Institute of Equipment Manufacturing Hawci Institutes,Chinese Academy of Sciences,Quanzhou Fujian 362000,China)

机构地区：[1]中北大学电气与控制工程学院,太原030051 [2]中国科学院海西研究院泉州装备制造研究中心,福建泉州362000

出　　处：《激光杂志》2022年第8期86-89,共4页Laser Journal

基　　金：中国科学院对外重点合作项目(No.121835KYSB20180062);中国科学院区域重点项目(No.KFJ-STS-QYZX-110);福建省闽都实验室主任基金(No.2021ZR107);福建省科技计划项目(No.2019T3025,2021T3060,2021T3032,2021T3010);莆田市科技计划项目(No.2020HJSTS004)。

摘　　要：基于显微拉曼特性以及表面缺陷对散射光的调制作用,提出一种光学元件表面缺陷的检测方法。通过共焦技术限制散射光信号采集范围,并利用拉曼散射光频率特性滤除其他散射光干扰,从而有效放大缺陷的调制影响,进而分析扫描后的光谱峰强成像图变化,间接实现对表面缺陷的表征。实验研究了两种共焦方式下的成像结果,验证了检测方法实现表面缺陷检测的有效性,为检测光学元件表面微小缺陷提供了新的思路。Based on the raman characteristics of micromanization and the modulation of scattered light by surface defects,a method for detecting surface defects of optical components is proposed.Confocal technology is used to limit the collection range of scattered light signals,and the frequency characteristics of Raman scattered light are used to filter out other light interference,so as to effectively amplify the impact of defects.Then,the characterization of surface defects can be realized indirectly by analyzing the intensity changes of the scanned spectral imaging images.The results of scanned imaging at two confocal modes are experimentally studied,which verify the effectiveness of detection method for realizing the detection of surface defects.a new idea is provided for the detection of small defects on the surface of optical components.

关 键 词：表面缺陷检测 光学元件 划痕 显微共焦 拉曼光谱峰强成像 

分 类 号：TN247[电子电信—物理电子学]