三丝型质点振速传感器的模型分析  

Theoretical Analysis of Three-Wire Particle Velocity Sensor

作　　者：王绥昌 郭轩瑞 朱林辉 张颖[2] 郭航[1,3] ONG Sui-chang;GUO Xuan-rui;ZHU Lin-hui;ZHANG Ying;GUO Hang(Pen-Tung Sah Institute of Micro-Nano Science and Technology,Xiamen University,Xiamen 361005,China;Department of New Energy Science and Engineering,Xiamen University Malaysia,Sepang,43900,Malaysia;Department of Electrical and Electronics Engineering,Xiamen University Malaysia,Sepang 43900,Malaysia)

机构地区：[1]厦门大学萨本栋微米纳米科学技术研究院,福建厦门361005 [2]厦门大学马来西亚分校新能源科学与工程系,马来西亚雪邦43900 [3]厦门大学马来西亚分校电子信息工程系,马来西亚雪邦43900

出　　处：《测控技术》2022年第9期44-49,共6页Measurement & Control Technology

基　　金：国家自然科学基金重点项目(21935009)。

摘　　要：矢量传声器在声源的识别检测与定位功能中有着极其重要的作用,质点振速传感器作为矢量传声器的核心原件,可以直接测量空气中质点振动速度。目前,两丝型传感器在理论与实验方面已有较多研究,而三丝型传感器仍然缺少相应的理论分析。从微通道内热传导方程出发,分别探究了该传感器在无声源和有声源情况下微通道内的稳态温度场和热扰动场,并以此初步建立了三丝型质点振速传感器的解析模型。随后,利用有限元仿真软件ANSYS进行建模与仿真,将得到的数值模拟结果与解析模型比对,验证了解析模型,为研发高性能质点振速传感器提供了理论分析与设计基础。Microflown plays an extremely important role in the function of sound source identification, detection and positioning.As the core component of microflown, particle velocity sensor(PVS) can directly measure particle vibration velocity in the air.At present, the theory and experiment of two-wire sensor type of PVS have been relatively mature, while the three-wire sensor type of PVS still lacks the corresponding theoretical analysis.Based on the heat conduction equation in the microchannel, the steady-state temperature field and thermal disturbance field in the microchannel under the condition of silent source and sound wave source are explored, and the analytical model of three-wire PVS is preliminarily established.Then, the finite element simulation in ANSYS is used for modelling and simulation.The numerical simulation results are compared with the analytical model to verify the correctness of the analytical model, which provides a theoretical basis for developing high performance of three-wire PVS.

关 键 词：质点振速传感器 热传导方程 微通道结构 解析模型 数值仿真 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]