一种硅谐振压力传感器敏感芯体的特性测试  

Characteristic Test of a Sensitive Core of Silicon Resonant Pressure Sensor

作　　者：王宏音 姚敏强 李拉兔 WANG Hong-yin;YAO Min-qiang;LI La-tu(AVIC Taiyuan AeroInstruments Co.,Ltd.,Taiyuan 030006,China)

机构地区：[1]航空工业太原航空仪表有限公司,山西太原030006

出　　处：《测控技术》2022年第9期84-89,共6页Measurement & Control Technology

基　　金：国家重点研发计划(2018YFF01010400)。

摘　　要：针对某型硅谐振压力传感器的压力敏感芯体,主要测试了该压力敏感芯体的幅频特性、相频特性、对气压的响应、对直流偏置电压的响应等关键特性,从而结合自激振荡理论,指导该传感器的驱动电路的设计与改进。该压力敏感芯体激励与输出信号分别为mV级、μV级的正弦波信号,信号发生器与示波器难以进行稳定、精确的激励与测量。使用矢量网络分析仪对某型硅谐振压力传感器进行稳定、精确的激励与测量,得到了要实现传感器稳定工作驱动电路必须达到的幅频条件与相频条件等关键指标,进而指导传感器的设计与应用。The key characteristics of the pressure sensitive core of a silicon resonant pressure sensor, such as amplitude-frequency characteristic, phase-frequency characteristic, response to air pressure and response to DC bias voltage are tested.The self-excited oscillation theory is used to guide the design and improvement of the drive circuit.The excitation and output signals of the pressure sensitive core are sine wave signals of mV level and μV level, it is difficult for the signal generator and oscilloscope to perform stable and accurate excitation and measurement.The vector network analyzer is used to stimulate and measure the sensor stably and accurately.The key indexes such as amplitude-frequency condition and phase-frequency condition are obtained to realize the stable work of the sensor driving circuit, which can guide the design and application of the sensor.

关 键 词：硅谐振 压力传感器 自激振荡 幅频特性 相频特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]