基于阳极键合的环形静电谐振器的制作与测试  

Fabrication and Testing of a Ring Electrostatic Resonator Based on Anode Bonding

作　　者：王俊铎 沈文江[2] WANG Junduo;SHEN Wenjiang(School of Nano Technol.and Nano Bionics,Univ.of Sci.and Technol.of China,Hefei 230026,P.R.China;Suzhou Institute of Nano-Tech and Nano-Bionics,Chinese Academy of Sci.,Suzhou,Jiangsu 215123,P.R.China)

机构地区：[1]中国科学技术大学纳米技术与纳米仿生学院,合肥230026 [2]中国科学院苏州纳米技术与纳米仿生研究所,江苏苏州215123

出　　处：《微电子学》2022年第3期484-491,共8页Microelectronics

摘　　要：设计了一种基于阳极键合的环形谐振器的制作方法,用以简化环形静电陀螺谐振器的制作工艺。采用(100)及(111)顶层硅的SOI,分别通过阳极键合工艺制作了硅基环形陀螺谐振器。分析了不同晶向下频率裂解的产生及对陀螺谐振的影响,同时通过仿真分析了晶向对双波腹与三波腹振型的影响程度。利用网络分析仪在真空腔内对器件进行扫频测试实验,得到了两种器件的幅频响应特性,讨论了双波腹与三波腹工作模态与晶向的关系。双波腹相对于三波腹更易受加工条件的影响,而相对的振动幅值更大。同时设计静电调谐的方法,解决了(111)晶向硅基双波腹存在的频率裂解较大的问题。A fabrication method of ring resonator based on anode bonding was designed to simplify the fabrication process of ring electrostatic gyro resonator. Silicon-based ring gyro resonators were fabricated using SOI with(100) and(111) top layers of silicon by anode bonding process. The generation of frequency splitting and its influence on gyro performance were analyzed theoretically. Meanwhile, the influence of crystal orientation on the double-and third-antinode mode was analyzed by software simulation. The matching degree of the double-and third-antinode operating modes with each crystal orientation was discussed. The amplitude-frequency response characteristics of the two devices were obtained by using network analyzer in vacuum chamber. The electrostatic force tuning method was illustrated to show how mode-matched operation can be done by adjusting dc voltages to get a new resonant frequency of(111) silicon-based ring gyro resonators..

关 键 词：环形谐振器 阳极键合 静电调谐 

分 类 号：TN751.2[电子电信—电路与系统]