Ka波段开关线型MEMS移相器的设计与研究  

Design and Research of a Ka-Band Switched-Line MEMS Phase Shifter

作　　者：吴倩楠[1,2,3] 范丽娜 侯文 李孟委[1,3] WU Qiannan;FAN Lina;HOU Wen;LI Mengwei(Academy for Advanced Interdisciplinary Research,North Univ.of China,Taiyuan 030051,P.R.China;School of Sci.,North Univ.of China,Taiyuan 030051,P.R.China;Center for Microsyst.Intergr.,North Univ.of China,Taiyuan 030051,P.R.China;School of Inform.and Commun.Engineer.,North Univ.of China,Taiyuan 030051,P.R.China)

机构地区：[1]中北大学前沿交叉科学研究院,太原030051 [2]中北大学理学院,太原030051 [3]中北大学微系统集成研究中心,太原030051 [4]中北大学信息与通信工程学院,太原030051

出　　处：《微电子学》2022年第3期492-497,共6页Microelectronics

基　　金：山西省研究生教育改革课题(110121)。

摘　　要：面向现代通信及相控阵雷达领域的需求,设计了一种移相间隔为22.5°的Ka波段4位开关线型射频MEMS移相器。主要对实现移相功能的四个移相单元进行了设计,采用台阶补偿技术优化移相单元上下通路分工选通,以提供最佳的阻抗匹配;采用直角转角结构,设计了可提高CPW直角性能的延迟线,并对应用该延迟线的4位开关线型移相器进行了总体设计。用HFSS进行建模仿真,结果表明,在0~40 GHz工作频段内,16个状态的插入损耗均小于2.15 dB,回波损耗均大于19.18 dB,驻波比均小于1.25,在40 GHz频点处的相移误差在1.57°以内,整体尺寸为10 mm^(2)。For the needs of modern communication and phased-array radar applications, a Ka-band 4-bit switched-line RF MEMS phase shifter with a phase shift interval of 22.5° was developed. The four phase shifting units, which primarily realized the phase shifting function, were designed to provide the best impedance matching by optimizing the division of the upper and lower paths of the phase shifting units to select the pass by using the step compensation technique. Using a right angle corner structure, a delay line that improved the performance of the CPW right angle was designed, and a general design of a 4-bit switched-line phase shifter applied with this delay line was presented. Modeling and simulating with HFSS showed that the insertion loss of all 16 states was less than 2.15 dB, the return loss was greater than 19.18 dB, the VSWR was less than 1.25, the phase shift error at 40 GHz was within 1.57°, and the overall size was 10 mm~2 in the 0~40 GHz operating band.

关 键 词：移相器 MEMS 高精度 小体积 直角转角 

分 类 号：TN389[电子电信—物理电子学]