粗铝丝超声键合的尾丝控制研究  

Study on Wire Tail Controlling in Heavy Aluminium Wire Bonding

作　　者：贺从勇 李双江[1] HE Congyong;LI Shuangjiang(The 24th Research Institute of China Electronics Technology Group Corp.,Chongqing400060,P.R.China)

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060

出　　处：《微电子学》2022年第3期513-518,共6页Microelectronics

基　　金：重庆科委基金资助项目(cstc2021jcyj-bsh0246)。

摘　　要：针对自动粗铝丝超声楔焊键合的尾丝质量问题,剖析了键合尾丝的形成机理,建立了键合尾丝缺陷故障树,构建了键合尾丝缺陷的因果关系图,提出了尾丝缺陷现象与根源因素的影响关系矩阵,确立了尾丝质量控制的关键控制点和控制要求。Wire tail defects exposed in ultrasonic wedge bonding on automatic heavy wire bonder were examined, and the generating mechanism of wire tail was analyzed. A wire tail fault tree was set up, a tail defects’ fishbone diagrams was built, and a relationship matrix between the phenomenon of tail wire defect and its root cause factors was proposed. The key factors and requirements of tail quality controlling were established.

关 键 词：粗铝丝键合 尾丝 质量控制 

分 类 号：TN405[电子电信—微电子学与固体电子学] TN406