背散射探测器在场发射扫描电镜纳米尺度高分辨表面分析中的应用  

Application of Backscattered Detector in Nano-Scale High-Resolution Surface Analysis of Field Emission SEM

作　　者：岳乃琳[1] 刘红艳[1] 张伟[1] YUE Nailin;LIU Hongyan;ZHANG Wei(Test Science and Experiment Center,Jilin University,Changchun 130012,China)

机构地区：[1]吉林大学测试科学实验中心,长春130012

出　　处：《吉林大学学报（理学版）》2022年第5期1189-1194,共6页Journal of Jilin University:Science Edition

基　　金：国家自然科学基金面上项目(批准号:51872115)。

摘　　要：以JSM-7900F型场发射扫描电子显微镜为例,讨论二次电子和背散射电子在形貌表征中的应用,利用该仪器配备的3种探头,通过优化实验条件,对具有纳米尺度的样品进行形貌观察,对比分析成像效果,并讨论各实验条件的影响因素.结果表明,利用背散射探测器结合电子束减速模式可对玻璃表面几纳米的颗粒成像,图像信噪比较高,成像效果优于高分辨模式即高位电子探头,拓展了背散射电子在高分辨成像中的应用.Taking JSM-7900 F type field emission scanning electron microscope as an example, the application of secondary electron and backscattered electron in the morphology characterization was discussed, three kinds of probes equipped with this instrument were used to observe the morphology of nano-scale samples by optimizing experimental conditions, and the influencing factors of various experimental conditions were analyzed and discussed. The results show that the backscattered detector combined with electron beam deceleration mode can be used to image several nanometers of particle on the glass surface, the signal-to-noise ratio of image is high, and the imaging effect is better than that of the high-resolution mode, that is, the upper electron probe, which expands the application of backscattered electron in high-resolution imaging.

关 键 词：扫描电镜 背散射电子 二次电子 探测器 高分辨 

分 类 号：TN16[电子电信—物理电子学]