阳极层霍尔推力器刻蚀机理与仿真研究  

Etching Mechanism and Simulation of the Anode Layer Hall Thruster

作　　者：许丽[1,2] 唐德礼[1] 李平川[1] 张帆[1] 张正浩 简毅 赵杰[1,2] XU Li;TANG Deli;LI Pingchuan;ZHANG Fan;ZHANG Zhenghao;JIAN Yi;ZHAO Jie(Southwestern Institute of Physics,Chengdu 610041,China;The Engineering and Technical College of Chengdu University of Technology,Leshan 614007,China)

机构地区：[1]核工业西南物理研究院,成都610041 [2]成都理工大学工程技术学院,乐山614007

出　　处：《真空科学与技术学报》2022年第8期601-607,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(11775073);四川省科技厅项目(2019YJ0705)。

摘　　要：基于等离子体放电理论,利用三维粒子仿真方法,针对阳极层霍尔推力器的极靴刻蚀进行数值仿真研究。获得入射到上、下极靴的入射离子能量和角度的分布,以及上、下极靴不同表面的轰击离子数量。由结果可知阳极层霍尔推力器的上极靴上表面、上极靴内表面以及下极靴内表面这三个面上轰击离子数量较多,为其他三个面上轰击离子数量的30倍。接着详细分析放电电压、磁场强度、气压对三个面的刻蚀速率分布的影响。此研究结果为推力器寿命评估以及降低内下极靴刻蚀程度提供了可靠的研究方法。In this paper,theoretical and simulation researches on the internal and external magnetic pole etching of the anode layer Hall thruster are carried out.First,the three-dimensional particle simulation method is used to obtain the distribution of the incident ion energy and angle incident on the inner and outer magnetic poles,as well as the number of bombarding ions on the different surfaces of the inner and outer magnetic poles.It can be seen from the results that the number of bombarding ions on the upper surface of the inner magnetic pole,the inner surface of the inner magnetic pole,and the inner surface of the outer magnetic pole is larger,which is 30 times the number of bombarding ions on the other three surfaces.Next,the influence of the discharge voltage,magnetic field strength,and air pressure on the etching rate distribution of the three surfaces is analyzed in detail,and the result of the etching rate obtained is consistent with the experiment.The results of this study provide a reliable research method for evaluating the life of the thruster and reducing the etching degree of the inner and outer magnetic poles.

关 键 词：刻蚀速率 推力器 等离子体 入射能量 入射角余弦值 

分 类 号：O462.5[理学—电子物理学] O532.11[理学—物理]