高温高湿环境下镍铬合金薄膜电阻器失效分析  

Failure Analysis of Ni-Cr Film Resistor in High Temperature and High Humidity Environment

作　　者：蔡亚丽 刘丽霞 戴文斌 俞亮 岳文锋 张冲 郭全胜 贾婷婷 于淑会[1] CAI Yali;LIU Lixia;DAI Wenbin;YU Liang;YUE Wenfeng;ZHANG Chong;GUO Quansheng;JIA Tingting;YU Shuhui(Shenzhen Institute of Advanced Technology,Chinese Academy of Sciences,Shenzhen 518055,China;School of Materials Science and Engineering,Hubei University,Wuhan 430062,China)

机构地区：[1]中国科学院深圳先进技术研究院,深圳518055 [2]湖北大学材料科学与工程学院,武汉430062

出　　处：《集成技术》2022年第5期88-98,共11页Journal of Integration Technology

基　　金：广东省基础与应用基础研究基金项目(2020B1515120019);深圳科学技术创新委员会项目(KQTD20170810160424889)。

摘　　要：在85℃和85%相对湿度的环境下,对镍铬(Ni-Cr)合金薄膜电阻器进行带载老化试验(“双85”老化试验),测试其老化试验3 000 h后的可靠性。测试结果显示,在“双85”老化试验环境下,薄膜电阻器进行老化试验后,表现出两种失效模式:阻值漂移和开路。该文进一步对两种失效模式的失效机理进行分析,阐明了失效的原因。针对失效的薄膜电阻,采用3D共聚焦激光显微镜、扫描电子显微镜、X射线能谱仪和聚焦离子束等分析手段进行检测,检测结果显示,薄膜电阻器的端电极处出现开裂。进一步对失效部位进行分析发现,电极层除开裂等明显问题外,还出现了银电极被硫化腐蚀的情况。The reliability of Ni-Cr alloy thin film resistors were tested by an aging test under an environment of 85 ℃ and 85% relative humidity for 3 000 h. The results show that the thin-film resistors exhibit two failure modes, resistance drift, and open circuit, after aging tests at 85 ℃ and 85% relative humidity. The failure mechanism of both failure modes was further analyzed, and the causes of failure were clarified. The failed resistors were examined by a 3D laser scanning microscope, scanning electron microscope, energy dispersive spectroscopy, and focused ion beam to analyze the cause of resistor failure.The results show that there is a crack in the terminal electrode of the film resistor. In addition to the obvious problems such as cracking, the electrode layer also showed sulfide corrosion of the Ag electrode.

关 键 词：NI-CR合金 薄膜电阻器 “双85”老化试验 失效模式 

分 类 号：TM544[电气工程—电器]