Ti-Al-Si-N多层梯度防护涂层热响应性能研究  

Thermal response of Ti-Al-Si-N multilayer gradient protective coating

作　　者：许创威 杨丽红[1] 吴雁 XU Chuangwei;YANG Lihong;WU Yan(School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai200093,China;School of Mechanical Engineering,Shanghai Institute of Technology,Shanghai201418,China)

机构地区：[1]上海理工大学机械工程学院,上海200093 [2]上海应用技术大学机械工程学院,上海201418

出　　处：《电子元件与材料》2022年第9期956-961,共6页Electronic Components And Materials

摘　　要：为研究Ti-Al-Si-N多层梯度防护涂层的热响应性能,首先通过理论求解与数值模拟相结合的方法对第一类边界条件下单层无限大平壁的瞬态温度场进行研究。结果表明:时间常数的解析解与仿真结果相对误差为3.43%,可以说明此数值模拟方法的可信度。接着,建立Ti-Al-Si-N多层梯度涂层的仿真模型,对第一类边界条件下的瞬态温度场进行仿真,得出该涂层厚度为1.5,3,4.5μm时,膜-基结合处的时间常数分别为5.49×10^(-6),5.84×10^(-6),6.21×10^(-6)s,时间常数随着涂层总厚度的变大而变大,但总体上不会影响基底上温度传感器的动态响应特性。最后对该涂层在热辐射边界条件下的瞬态温度场进行仿真,得到膜-基结合处的时间常数为69.7 s,此类边界条件会严重影响基底上温度传感器的动态响应特性。研究结果对进一步合理设计和使用Ti-Al-Si-N多层梯度防护涂层有一定的指导意义。To determine the thermal response of Ti-Al-Si-N multilayer gradient protective coating, transient temperature field was studied by both theoretical and numerical simulation methods for infinite flat single layer using the first type boundary conditions. The results show that the relative error between the two methods is 3.43%, which verifies the reliability of the numerical simulation. After that, model of the Ti-Al-Si-N multilayer gradient film was established for transient temperature field simulation under the first boundary condition. The time constants at the film-substrate junction is 5.49×10^(-6),5.84×10^(-6),6.21×10^(-6)s for coating thickness of 1.5,3 and 4.5 μm, respectively. The time constant increases with the total coating thickness, which however does not interfere with the dynamic response of the temperature sensor on the substrate. Finally, the transient temperature field in the coating was simulated under thermal radiation boundary conditions. The time constant at the film-substrate junction is 69.7 s, which indicates that the dynamic response of the temperature sensor on the substrate will be significantly affected by the boundary conditions. The research results can provide certain guide for design and application of the Ti-Al-Si-N multilayer gradient protective coating.

关 键 词：薄膜温度传感器 防护涂层 数值模拟 时间常数 

分 类 号：TB34[一般工业技术—材料科学与工程]