中波红外减反射硬质薄膜研究进展(特邀)  

Research Advances in Medium Wave Infrared Antireflection Hard Coating(Invited)

作　　者：朱泽宇 潘雨婷 吴晗 温俊仁 郝凌云 高程 杨陈楹 邵宇川[1,2,3] 邵建达 ZHU Zeyu;PAN Yuting;WU Han;WEN Junren;HAO Lingyun;GAO Cheng;YANG Chenying;SHAO Yuchuan;SHAO Jianda(Thin Film Optics Laboratory,Shanghai Institute of Optics and Fine Mechanics,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China;Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou 310024,China)

机构地区：[1]中国科学院上海光学精密机械研究所薄膜光学实验室,上海201800 [2]中国科学院大学,北京100049 [3]国科大杭州高等研究院,杭州310024

出　　处：《光子学报》2022年第9期63-79,共17页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.62104234,52103279)。

摘　　要：中波红外即3~5μm波段红外线,在大气中具有良好的透过率。中波红外探测器被广泛应用于红外制导、红外成像、气体检测分析、空间遥感等领域。为提高系统性能和增强探测器对各种恶劣工作环境的抵抗力,在光学窗口和薄膜表面常镀制高硬度薄膜进行保护。本文从硬质薄膜入手,阐述了中波红外减反射硬质薄膜的设计、材料选择及应用,根据不同材料体系总结了金属氧化物、氮化物、类金刚石及碳化物薄膜等常见中波红外波段硬质薄膜的光学、力学性能等,并概述了晶界强化、模量差理论、纳米复合材料等目前主要的薄膜硬度强化方法。Medium Wave Infrared(MWIR)light(@3~5μm)has high transmittance in the atmosphere.MWIR detectors have been widely used in the fields of infrared guidance,infrared imaging,gas detection,and space remote sensing,especially in military application prospects.High-temperature infrared radiation is generated by high-speed aircraft and missiles due to air friction and jet exhaust,which is often detected by infrared detectors.Compared with short-wave infrared,radar,and laser detectors,MWIR detectors possess higher sensitivity.In addition,the absorption lines of massive gas molecules concentrate in the midwave infrared band,thus it is often used for gas detection and industrial analysis.In practical applications,detector windows and lens of MWIR systems will be deposited with Anti-Reflection(AR)coating to reduce the energy loss during propagation and improve the imaging quality by eliminating stray light.However,coating materials are typically soft.Anti-reflection coating materials commonly used in midwave infrared band e.g.Ge,ZnS,MgF_(2),have excellent optical properties,but poor mechanical properties.To improve the optical performance of the systems and enhance the resistance to various harsh working environments,the optical windows and the surfaces of the films are usually coated with high hardness film for protection.This article describes the design,material selection and application of the MWIR antireflection hard coating.A summary of common hard film materials including the metal oxides,nitrides,and carbides are presented with the optical and mechanical properties.And the grain size strengthening,Koehler theory,nanocomposites methods are outlined to improve the film hardness.The first section illustrates the design theory of anti-reflection film,solutions to the high stress issue of hard protective film,and the design strategy of hard anti-reflection film.The second part introduces representative hard film materials in the mid-wave infrared band.The relationship between substrate temperature,gas flow rate,deposition

关 键 词：中波红外 减反射 硬质薄膜 力学性能 透射率 

分 类 号：TB43[一般工业技术]