用于垂直腔面发射激光器的超薄光子晶体反射镜  

Ultra-thin Photonic Crystal Mirror for Vertical-cavity Surface-emitting Lasers

作　　者：王海静 王俊[1] 李家琛 肖春阳 贾艳星 明蕊 马博杰 刘倬良 刘凯[1] 白一鸣[2] 黄永清[1] 任晓敏[1] WANG Haijing;WANG Jun;LI Jiachen;XIAO Chunyang;JIA Yanxing;MING Rui;MA Bojie;LIU Zhuoliang;LIU Kai;BAI Yiming;HUANG Yongqing;REN Xiaomin(State Key Laboratory of Information Photonics and Optical Communications,Beijing University of Posts and Telecommunications,Beijing 100876,China;State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources,North China Electric Power University,Beijing 102206,China)

机构地区：[1]北京邮电大学信息光子学与光通信国家重点实验室,北京100876 [2]华北电力大学新能源电力系统国家重点实验室,北京102206

出　　处：《光子学报》2022年第9期228-235,共8页Acta Photonica Sinica

基　　金：国家自然科学基金(Nos.61874148,61974141);国家重点研发计划重点专项课题(No.2018YFB2200104);国家自然科学基金创新研究群体项目(No.62021005);北京市科技计划课题(No.Z191100004819012);北京市自然科学基金(No.4212055);高校学科创新引智计划(No.BP0719012,111基地)。

摘　　要：提出了一种光子晶体反射镜作为垂直腔面发射激光器的P面反射镜,并分析了其反射特性。为了设计在850 nm波段具有高反射率和宽带宽的光子晶体反射镜,采用三维时域有限差分法对光子晶体反射镜的结构参数进行计算优化。结果表明,当二维光子晶体结构的气孔半径为84 nm,周期为212 nm,高度为90 nm时,对应TE光学模式的高反射率(R≥99.5%)带宽为106 nm,与中心波长之比为12.5%;同时对于TM光学模式的反射率低于80%,具有较宽的偏振选择性。并且光子晶体反射镜薄,串联电阻小,没有氧化物引入的电阻和应力问题。因此,提出的新型光子晶体反射镜可替代传统垂直腔面发射激光器的P型分布布拉格反射镜,提供高反射率和宽带宽,并提高器件的光电性能。A new type of photonic crystal mirror was proposed as the P-side mirror of the vertical-cavity surface-emitting laser,and the reflection characteristics of the photonic crystal mirror were studied and analyzed by using the three-dimensional finite-difference time domain method.In this paper,taking 850 nm vertical-cavity surface-emitting laser as an example,a photonic crystal mirror suitable for it was designed.To make photonic crystal mirrors meet the requirements of 850 nm vertical-cavity surface-emitting lasers for mirrors,it needs to have high reflectivity and wide bandwidth in the 850 nm band.The structural parameters that need to be optimized in the photonic crystal mirror include a grating layer,a twodimensional photonic crystal layer,and a spacer layer between the grating layer and the two-dimensional photonic crystal layer.It can be seen that many structural parameters need to be optimized,so the control variable method is used to optimize the parameters.Because our research group has done a lot of research on grating structure,to reduce the amount of calculation,it is necessary to optimize the two-dimensional photonic crystal structure first and then optimize the grating structure.After optimization calculations,the optimal structural parameters of the photonic crystal mirror are that the grating period is 636 nm,the thickness is 162 nm,the duty cycle is 16.35%,the thickness of the spacer layer is 86 nm,and the air hole radius of the two-dimensional photonic crystal structure is 84 nm,the period is 212 nm,and the height is 90 nm.When the photonic crystal mirror has optimal structural parameters,its high reflectivity bandwidth in TE optical mode is 106 nm,and the ratio to the central wavelength is 12.5%.At this time,the reflectivity of the photonic crystal mirror at the center wavelength of 850 nm is greater than 99.5%.However,the reflectivity in the TM optical mode is lower than 80%,so the photonic crystal mirror not only meets the requirements of the vertical-cavity surface-emitting laser for the mirror

关 键 词：垂直腔面发射激光器 光子晶体反射镜 时域有限差分法 分布布拉格反射镜 二维光子晶体 宽带宽 

分 类 号：O472[理学—半导体物理]