基于柔性铰链的FBG三维加速度传感器  

FBG Three-Dimensional Acceleration Sensor Based on Flexible Hinge

作　　者：严超凡 戴玉堂[1] 杨雨微 罗开彦 YAN Chaofan;DAI Yutang;YANG Yuwei;LUO Kaiyan(National Engin.Research Center of Fiber Optic Sensing Technol.and Networks,Wuhan University of Technol.,Wuhan430070,CHN)

机构地区：[1]武汉理工大学光纤传感技术与网络国家工程研究中心,武汉430070

出　　处：《半导体光电》2022年第4期697-703,共7页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(51975442)。

摘　　要：针对振动测量中三维振动信号测量需要,基于柔性铰链设计了一种光纤光栅(FBG)三维加速度传感器。构建了传感器拾振机构的振动模型,介绍了传感器的结构模型和测量原理,推导了传感器谐振频率和灵敏度理论公式,建立了拾振机构的数学模型,并用MATLAB对传感器拾振机构关键尺寸参数进行优化设计。根据优化后尺寸制作了传感器,通过振动实验对其进行性能测试。实验结果表明:该传感器在X轴、Y轴和Z轴方向的谐振频率分别为673,667和1376 Hz,工作频率区间分别为0~220 Hz,0~220 Hz和0~450 Hz,灵敏度分别为72.3,70.2和83.1 pm/g。所设计的传感器具有较好的横向抗干扰能力,能够满足三维振动信号测量的要求。To meet the needs of three-dimensional vibration signal measurement in vibration measurement,a fiber Bragg grating three-dimensional acceleration sensor was designed based on flexible hinge.The vibration model of the pickup mechanism of the sensor was constructed,the structural model and measurement principle of the sensor were introduced,the theoretical formulas for the resonant frequency and sensitivity of the sensor were deduced,the mathematical model of the pickup mechanism was established,and the key dimension parameters of the pickup mechanism of the sensor were optimized and designed by MATLAB.The sensor was fabricated according to the optimized dimension,and its performance was tested by vibration experiments.The experimental results show that the resonant frequencies of the sensor in the X-axis,Y-axis and Z-axis directions are 673,667 and 1376 Hz,respectively,the operating frequency ranges are 0~220 Hz,0~220 Hz and 0~450 Hz,respectively,and the sensitivities are 72.3,70.2 and 83.1 pm/g,respectively.The designed sensor has good lateral anti-interference degree and can meet the requirements of three-dimensional vibration signal measurement.

关 键 词：光纤光栅 三维加速度传感器 柔性铰链 振动测量 

分 类 号：TN253[电子电信—物理电子学] TP212.14[自动化与计算机技术—检测技术与自动化装置]