基于薄膜工艺的1030GHz混频器和750~1100GHz倍频器研制  

Design of a 1030GHz mixer and a 750~1100GHz tripler based on thin-film technology

作　　者：孟进 张德海 牛斌[2,3] 朱皓天 刘锶钰 范道雨 陈胜堂 周明 MENG Jin;ZHANG De-Hai;NIU Bin;ZHU Hao-Tian;LIU Si-Yu;FAN Dao-Yu;CHEN Sheng-Tang;ZHOU Ming(CAS Key Laboratory of Microwave Remote Sensing,National Space Science Center,Chinese Academy of Sciences,Beijing 100190,China;Science and Technology on Monolithic Integrated Circuits and Modules Laboratory,Nanjing Electronic Devices Institute,Nanjing 210016,China;Nanjing Chip Valley Industrial Technology Institute,Nanjing 210016,China)

机构地区：[1]中国科学院国家空间科学中心微波遥感重点实验室,北京100190 [2]南京电子器件研究所微波毫米波单片集成和模块电路重点实验室,江苏南京210016 [3]南京中电芯谷高频器件产业技术研究院有限公司,江苏南京210016

出　　处：《红外与毫米波学报》2022年第5期871-878,共8页Journal of Infrared and Millimeter Waves

基　　金：中国科学院青年创新促进会(E1213A041S);中科院国家空间科学中心“攀登计划”(E0PD40013S)。

摘　　要：基于南京电子器件研究所砷化镓工艺线,自主完成了750~1100 GHz全频带三倍频器以及中心频率为1030 GHz的低损耗二次谐波混频器的研制。为了提升模块的性能,将传统的场路结合的设计方法进行了扩展,引入器件的参数优化,并建立起两者互为反馈的关系,从而达到整个设计过程的闭环。研制出的单片电路厚度为3μm,并通过梁氏引线支撑悬置于腔体结构中。测试结果表明宽带倍频器在790~1100 GHz频率范围内输出功率为-23~-11 dBm。以上述倍频源作为射频信号对二次谐波混频器进行测试,在1020~1044 GHz频率范围内变频损耗优于17.5 dB,在1030 GHz处测得的最小变频损耗为14.5 dB。Based on the GaAs process of Nanjing electronic devices institute,a 750~1100 GHz tripler and a low loss 1030 GHz sub-harmonic mixer have been completed.To improve the performance of the module,the parameter optimi-zation of the device is introduced in the traditional design method of field circuit combination,and the mutual feedback relationship is established.Therefore,the whole design process establishes the closed-loop.The 3μm thick monolithic circuit is supported in the cavity structure by using beam lead.The measured result shows that the output power of the broadband frequency multiplier is-23~-11 dBm in the frequency range of 790~1100 GHz.Using the above-mentioned frequency multiplier source as the RF signal to test the sub-harmonic mixer,the conversion loss is better than 17.5 dB in the frequency range of 1020~1044 GHz,and the minimum conversion loss is 14.5 dB at 1030 GHz.

关 键 词：太赫兹 单片电路 谐波混频器 宽带倍频 

分 类 号：TN771[电子电信—电路与系统]