supported by the National Natural Science Foundation of China (Grants Nos. 60977043,61007063 and 61228501);National High-Tech Research & Development Program of China ("863" Project)(Grant No. 2012AA012203);Tang Zhongyin Fund;the Scholarship Award for Excellent Doctoral Student granted by the Ministry of Educationof China
As the transistor's feature scales down and the integration density of the monolithic circuit increases continuously,the traditional metal interconnects face significant performance limitation to meet the stringent de...