载体驱动微机械陀螺仪结构优化及性能仿真  

Structural Optimization and Performance Simulation of Carrier-driven Micromachined Gyroscope

作　　者：姜珊 张伟[1] JIANG Shan;ZHANG Wei(Key Laboratory of Sensors in Beijing University of Information Science and Technology,Beijing 100101,China)

机构地区：[1]北京信息科技大学传感器重点实验室,北京100101

出　　处：《传感器世界》2022年第8期10-16,共7页Sensor World

基　　金：国家自然科学基金资助项目(No.61372016);北京市传感器重点实验室开放课题基金资助项目(No.2021XXX)。

摘　　要：MEMS陀螺仪是惯性制导系统中的关键仪表,其测量性能直接决定制导的精准度。但是,惯性制导系统旋转速度极高,其运动姿态难以准确实时测量。针对这一问题,研制了一种适用于高旋系统的载体驱动微机械陀螺仪。以提高机械灵敏度为目标,对载体驱动微机械陀螺仪进行了结构优化,使用MATLAB对敏感元件的结构参数进行了优化,利用COMSOL软件建立了仿真模型,对优化后的结构进行了模态分析、静力学分析、谐响应分析和重力分析,验证了优化方案的合理性。经结构优化后,陀螺仪的固有频率为201.3 Hz,机械灵敏度为13.3 nm/(°/s),较优化前提高了57.2%。MEMS gyroscope is a key instrument in inertial guidance system.Its measurement performance directly determines the accuracy of guidance.However,the rotation speed of inertial guidance system is very high,and its motion attitude is difficult to be measured accurately and in real time.In order to solve the problem,a carrier driven micromachined gyroscope suitable for high rotation system is developed.In order to improve the mechanical sensitivity,the structure of the carrier-driven micromachined gyroscope was optimized,the structural parameters of the sensitive element were optimized by MATLAB,the simulation model was established by COMSOL software,and the modal analysis,static mechanical analysis,harmonic response analysis and gravity analysis verify the rationality of the optimization scheme.After structural optimization,the natural frequency of the gyroscope is 201.3 Hz,and the mechanical sensitivity is 13.3 nm/(°/s),which is 57.2%higher than that before optimization.

关 键 词：微机械陀螺仪 COMSOL仿真 有限元分析 结构优化 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]