滚动导轨系统空间误差检测的正交光栅补偿  

Orthogonal grating compensation for spatial error detection of rolling guide system

作　　者：朱爽[1] 王琳[1] 高强[1] 彭胡 ZHU Shuang;WANG Lin;GAO Qiang;PENG Hu(Shenyang Institute Of Engineering,Shenyang 110136,China)

机构地区：[1]沈阳工程学院,沈阳110136

出　　处：《激光杂志》2022年第9期193-197,共5页Laser Journal

基　　金：辽宁省教育厅项目LJKZ1094。

摘　　要：为解决由于光栅信号随机性和不均匀性导致滚动导轨系统空间误差点补偿精度较低等问题,提出一种滚动导轨系统空间误差检测的正交光栅补偿方法。根据滚动导轨移动方向和自由度构建空间误差模型,为确保两路光栅信号严格正交,通过纵向矢量调整补偿量,完成相位量的补偿。将神经网络技术与正交光栅误差空间误差补偿模型相结合,降低导轨噪声等干扰信号与光栅信号叠加的概率,实现滚动导轨系统空间误差误差检测的正交光栅补偿。实验结果表明:所提方法对滚动导轨系统空间误差点补偿精度始终高于90%,具有一定可行性。In order to solve the problem of low compensation accuracy of spatial error points of a rolling guide rail system due to the randomness and non-uniformity of the grating signal,an orthogonal grating compensation method for spatial error detection is proposed.The spatial error model is constructed according to the moving direction and degree of freedom of the rolling guide rail.In order to ensure that the two grating signals are strictly orthogonal,the compensation amount is adjusted through the longitudinal vector to complete the phase compensation.The neural network technology is combined with the orthogonal grating error spatial error compensation model to reduce the probability of superposition of interference signals such as guide rail noise and grating signals,and realize the orthogonal grating compensation for the spatial error detection of the system.The experimental results show that the compensation accuracy is always higher than 90%.

关 键 词：正交光栅补偿 移动方向 自由度 神经网络技术 空间误差检测 

分 类 号：TN374[电子电信—物理电子学]