eFuse熔丝电阻值的测量方法  

Method for Measurement of Fuse Resistance Value in eFuse

作　　者：晏颖 张睿[2] YAN Ying;ZHANG Rui(Shanghai HuaLi Microelectronic Corporation,Shanghai 201316,China;School of Micro-Nano Electronics,Zhejiang University,Hangzhou 310014,China)

机构地区：[1]上海华力集成电路制造有限公司,上海201316 [2]浙江大学微纳电子学院,杭州310014

出　　处：《电子与封装》2022年第10期18-25,共8页Electronics & Packaging

摘　　要：作为电编程熔丝(eFuse)中的存储介质,熔丝的电阻值用来表征所存储的数据。2种采用5端口法设计的测试单元被用来测量eFuse单元中熔丝的电阻值以及编程控制管的特性参数,并应用于后续通过测试芯片测量eFuse中熔丝电阻的方案中,以间接测量eFuse编程通路的电阻值并消除漏电电流影响的方式准确推算出熔丝的电阻值。最后,提出了1种在常规eFuse中增加辅助电路来测量熔丝电阻的设计方案及测量方法。As the storage medium in the electrical programming fuse(eFuse),the resistance value of the fuse is used to characterize the stored data.Two test units designed with 5-port method are proposed to measure the resistance value of the fuse in the eFuse unit and the characteristic parameters of the programming control tube,and are applied to the subsequent schemes of measuring the fuse resistance in eFuse by the test chip.The schemes accurately obtain the fuse resistance by indirectly measuring the resistance of bit programming path in eFuse and eliminating the influence of leakage current.Finally,a design scheme and measurement method of adding an auxiliary circuit to the conventional eFuse for the measurement of fuse resistance value are proposed.

关 键 词：电编程熔丝 熔丝 电阻值测量 

分 类 号：TN305.94[电子电信—物理电子学]