FCVAD技术制备CrCN薄膜的热稳定性研究  

Study on Thermal Stability of CrCN Films Prepared by FCVAD Technology

作　　者：吴帅 刘爽[1] 覃礼钊[1] 张旭[2] 张同华[1] 廖斌[2] 王可平 WU Shuai;LIU Shuang;QIN Li-zhao;ZHANG Xu;ZHANG Tong-hua;LIAO Bin;WANG Ke-ping(Department of Materials and Energy,Southwest University,Chongqing 400715,China;Key Laboratory of Beam Technology and Material Modification of Ministry of Education,Beijing Normal University,Beijing 100875,China;Jinmao Textile Equipment Co.,Ltd.,Chongqing 400715,China)

机构地区：[1]西南大学材料与能源学院,重庆400715 [2]北京师范大学射线束技术与材料改性教育部重点实验室,北京100875 [3]金猫纺织器材有限公司,重庆400715

出　　处：《真空》2022年第5期14-19,共6页Vacuum

基　　金：2018年重庆市技术创新与应用示范(产业类)重点研发项目(cstc2018jszx-cyzdX0093);重庆市技术创新与应用发展(面上项目)(cstc2020jscx-msxm1818)。

摘　　要：磁过滤真空阴极弧沉积(FCVAD)技术制备的CrCN薄膜具有优异的机械性能,可作为表面改性膜应用于纺织器材、pcb钻头和活塞环中。本文针对薄膜因摩擦产生高温或应用环境温度高,其结构和性能将发生变化的情况,研究了CrCN薄膜的热稳定性。通过X射线衍射(XRD)、场发射扫描电子显微镜(FESEM)、拉曼光谱(Raman)和X射线光电子能谱(XPS)对常温至800℃下薄膜的结构进行了表征。结果显示:FCVAD技术制备的CrCN薄膜热稳定上限温度约为400℃。温度在400℃以下时,CrCN薄膜结构稳定,保持无序状态;当温度达到500℃时,薄膜表面出现细小晶粒,薄膜中的CrN相转化为Cr_(2)N相;随着温度继续升高,CrCN固溶相开始石墨化,薄膜内晶粒尺寸变大;当温度大于700℃时,薄膜中的碳以CO或CO_(2)的形式脱离薄膜,Cr元素以Cr_(2)O_(3)相的形式存在,并在800℃长成尺寸约400nm的晶粒。CrCN films prepared by magnetic filtration cathodic arc deposition(FCVAD)technology have excellent mechanical properties and can be used as surface modified films in textile equipment,pcb drill bits and piston rings.In this paper,the thermal stability of CrCN films was investigated for the situation that the structure and properties of films will change due to high temperature caused by friction or high temperature of application environment.Structure of the films from room temperature to 800℃ was characterized by X-ray diffraction(XRD),field emission scanning electron microscopy(FESEM),Raman spectroscopy(Raman),and X-ray photoelectron spectroscopy(XPS).The results show that the upper limit of thermal stability of CrCN films prepared by FCVAD technique is about 400℃.When the temperature is below 400℃,the structure of CrCN films is stable and remains disordered.When the temperature reaches 500℃,fine grains appear on the surface of the films,and the CrN phase in the films is transformed into Cr_(2)N phase.As the temperature continues to increase,the CrCN solid solution phase starts to graphitize,and the grain size within the films becomes larger.When the temperature is greater than 700℃,carbon in the films leaves in the form of CO or CO_(2),and Cr element exists in the form of Cr_(2)O_(3) phase and grows into grains with a size of about 400nm at 800℃.

关 键 词：FCVAD技术 CrCN薄膜 热稳定性 

分 类 号：TG156.21[金属学及工艺—热处理]