高效节能型聚对二甲苯真空镀膜设备研制及其在农业领域的应用  

Development of High-Efficiency and Energy-Saving Parylene Vacuum Coating Equipment and Its Application in Agriculture

作　　者：李志胜 刘小江 段玉权[3] 林琼[3] 王晓冬[4] LI Zhi-sheng;LIU Xiao-jiang;DUAN Yu-quan;LIN Qiong;WANG Xiao-dong(Beijing Standfor Technoloyg Co.,Ltd.,Beijing 102400,China;School of Mechanical Engineering,Shenyang University of Technology,Shenyang 110870,China;Institute of Agri-food Science and Technology,Chinese Academy of Agriculture Science,Beijing 100905,China;School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China)

机构地区：[1]北京胜泰东方科技有限公司,北京102400 [2]沈阳工业大学机械工程学院,辽宁沈阳110870 [3]中国农业科学院农产品加工研究所,北京100905 [4]东北大学机械工程与自动化学院,辽宁沈阳110819

出　　处：《真空》2022年第5期38-44,共7页Vacuum

摘　　要：随着聚对二甲苯(Parylene)镀膜技术的快速发展和应用,如何有效提高聚对二甲苯材料的利用率、提高成膜质量、降低生产成本等在工业化生产过程中被广泛关注。本文对常规聚对二甲苯真空镀膜设备的结构特点和应用现状进行了详细分析,结合稀薄气体流动特性、传热学及工业化生产需求,设计研制了采用内置裂解加热器的聚对二甲苯真空镀膜设备。同时,根据聚对二甲苯镀膜室特有的环境工况以及膜层可抵御酸碱、盐雾、霉菌的特性,提出了对鲜花和低水分干种子进行镀膜保护的工艺研究,拓展了聚对二甲苯镀膜技术在农业领域的应用。With the rapid development and wide application of parylene coating technology,how to effectively increase the utilization rate of parylene materials,improve the quality of the film,and reduce costs has been widely concerned in the industrial production process.In this paper,depending on the structural characteristics and application status of conventional parylene vacuum coating equipment,a type of parylene vacuum coating equipment with a built-in pyrolyzer is developed,in which flow characteristics of rare gas,heat transfer and industrial production requirements are concerned.At the same time,according to the unique environmental conditions of the parylene coating room and the characteristics of the film to resist acid and alkali,salt spray and mold,coating protection for flowers and low-moisture dry seeds is proposed,which will expand the application of parylene coating technology in the agricultural field.

关 键 词：聚对二甲苯 气相沉积 内置裂解器 干种子 

分 类 号：TH69[机械工程—机械制造及自动化] TB742[一般工业技术—材料科学与工程] S473[一般工业技术—真空技术]