高功率激光光学元件超精密制造技术  

Ultra-Precision Manufacturing Technology of High Power Laser Optics

作　　者：许乔[1] 陈贤华[1] 汪圣飞 钟波[1] 谢瑞清[1] 王健[1] Xu Qiao;Chen Xianhua;Wang Shengfei;Zhong Bo;Xie Ruiqing;Wang Jian(Research Centre of Laser Fusion,China Academy of Engineering Physics,Mianyang 621900,Sichuan,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《光学学报》2022年第17期195-213,共19页Acta Optica Sinica

摘　　要：用于惯性约束聚变的高功率固体激光装置需使用上万件大口径光学元件,激光装置极端的设计性能对光学元件提出了全空间频段(空间频率范围为μm^(-1)级至m^(-1)级)精度指标和高抗激光损伤的制造要求,形成确定性、高性能的强激光光学元件制造能力是制造激光装置的基础。总结了近年来大口径高功率激光光学元件超精密制造技术及装备方面的研究进展,重点介绍了超精密磨削成形技术、保形快速抛光技术、确定性抛光技术、晶体超精密切削技术及低缺陷制造技术,并分析了高功率激光光学元件制造的未来发展趋势。A high power solid laser facility used for inertial confinement fusion(ICF)demands over ten thousands of large aperture optics.Extremely precise machining accuracy specified over a continuous range of spatial frequencies(μm^(-1)level to m^(-1)level)as well as high resistance to laser damage is the fundamental requirement for high power laser optics.Advanced and deterministic optical manufacturing technologies are the basis to realize mass manufacturing of the large aperture laser optics.In this review,recent progresses in the ultra-precision manufacturing technologies and equipment for high power laser optics are summarized.Advances of ultra-precision grinding,rapid conformal polishing,deterministic polishing,ultra-precision fly-cutting,and low-density defect manufacturing technologies are emphasized.Besides,future developments of fabrication of high power laser optics are analyzed.

关 键 词：测量 先进光学制造 高功率激光 超精密制造 

分 类 号：TH74[机械工程—光学工程]