柔性氧化物薄膜晶体管研究进展  

Research Progress of Flexible Oxide Thin Film Transistors

作　　者：张立荣[1,2] 肖文平[1] 谢飞[1] 赵良红[1] 刘淳[2] 李非凡[2] 左文财 吴为敬 ZHANG Lirong;XIAO Wenping;XIE Fei;LIU Chun;LI Feifan;ZUO Wencai;WU Wejing(Shunde Polytechnic,Guangdong Foshan 528300,China;Institute of Polymer Optoelectronic Materials and Devices,State Key Laboratory of Luminescent Materials and Devices,South China University of Technology,Guangzhou 510641,China)

机构地区：[1]顺德职业技术学院,广东佛山528300 [2]华南理工大学发光材料与器件国家重点实验室,高分子光电材料与器件研究所,广东广州510641

出　　处：《材料研究与应用》2022年第5期718-729,共12页Materials Research and Application

基　　金：广东省普通高校重点科研平台和科研项目(2018GKTSCX039,2022KQNCX279)。

摘　　要：氧化物半导体由于具有相对较高的载流子迁移率、良好的均匀性和光学透明度、较低的工艺温度、低成本及可在柔性衬底上制作等特点,近十年来引起了人们的广泛关注。基于氧化物有源层的柔性薄膜晶体管(TFT)已经在下一代显示器(AMOLED,Micro LED)、物联网技术、柔性传感器、可穿戴领域及微型植入系统等领域中获得应用。综述了氧化物TFT的器件结构,介绍了柔性氧化物TFT的研究进展,包括在不同种类的柔性衬底PET、PEN、PI上制作TFT的研究现状,并对氧化物TFT的未来发展进行了总结和展望。Oxide semiconductors(OS)have attracted a lot of attention in the last decade due to their relatively high carrier mobility,good uniformity,low processing temperature,optical transparency,low cost,and can be fabricated especially on flexible substrates.Flexible thin-film transistors(TFTs)based on OS active layers have gained applications in next-generation displays(AMOLED,Micro LED),IoT technologies,flexible sensors,wearable fields,and micro-implant systems.This paper reviews the oxide TFT device structure,introduces the research progress of flexible oxide TFTs,including the current research status of TFTs fabricated on different types of flexible substrates PET,PEN,and PI.Last,summary and outlook on the future development of oxide TFTs are given.

关 键 词：氧化物半导体 氧化物薄膜晶体管 柔性衬底 显示器 

分 类 号：TN304.2[电子电信—物理电子学]