基底温度对氧化铂薄膜结构与催化性能的影响  

Influence of Substrate Temperature on the Structure and Electrocatalytic Property of Platinum Oxide Films

作　　者：沈月 李思勰 唐玲 王传军 许彦亭 闻明 Shen Yue;Li Sixie;Tang Ling;Wang Chuanjun;Xu Yanting;Wen Ming(Sino-Platinum Metals Co.,Ltd,Kunming 650106,China;Kunming Guiyan Catalyst Co.,Ltd,Kunming 650000,China)

机构地区：[1]贵研铂业股份有限公司,云南昆明650106 [2]昆明贵研催化剂有限责任公司,云南昆明650000

出　　处：《稀有金属材料与工程》2022年第9期3466-3472,共7页Rare Metal Materials and Engineering

基　　金：昆明市科技计划重点项目(2019-1-G-25318000003405);云南省创新团队项目(2019HC024);昆明市稀贵金属溅射靶材科技创新团队项目(13020169)。

摘　　要：氧化铂电极是安全壳内置氢浓度监测传感器的重要元件,因其力学和电催化性不足而使氢传感器处于瓶颈,限制了我国AP1000技术的全面国产化。采用反应磁控溅射法在铂基材上成功制备出氧化铂薄膜电极,并探究了不同基底温度对薄膜组成、形貌及电催化性能的影响。结果表明,在Ar/50%O_(2)溅射气氛下可获得由PtO和PtO_(2)组成的氧化铂薄膜。随着温度由室温(RT)升至200℃时,非晶态薄膜中氧空位逐渐被修复并转化为晶态,形成具有三维纳米枝晶状、分布均匀、无裂纹的薄膜,其PtO_(2)占比提高,电化学活性面积(ECSA)增加,稳定性及氢还原性提高;而随着温度升至400℃时,薄膜中氧空位浓度大幅降低,平均晶粒尺寸进一步增加,PtO_(2)逐步分解为PtO和Pt,ECSA减小,稳定性及氧还原活性降低。Platinum oxide electrode,as an important part of hydrogen concentration monitoring sensor built in containment,makes hydrogen sensor at a bottleneck due to its insufficient mechanical and electrocatalytic properties,which limits the overall localization process of AP1000 technology in China.In the present study,platinum oxide film electrode was successfully prepared on platinum substrate by reactive magnetron sputtering,and the influence of different substrate temperature on the composition,morphology and electrocatalytic property of the film was investigated.The results show that platinum oxide film composed of PtO and PtO_(2) can be obtained in Ar/50%O_(2) sputtering atmosphere.As the temperature increases from room temperature(RT) to 200 ℃,the oxygen vacancies in the amorphous film are gradually repaired and converted to the crystalline state,forming a three-dimensional nano-dendritic and crack-free film with uniform distribution.Ratio of PtO_(2) increases,electrochemical active area(ECSA) increases,and stability improves.When the temperature rises to 400 ℃,oxygen vacancies concentration decreases,average grain size increases.Since PtO_(2) decomposes into PtO and Pt,and thus ECSA decreases,the stability and oxygen reduction activity of the films decreases gradually.

关 键 词：磁控溅射 氧化铂 微观结构 电催化性能 

分 类 号：TB43[一般工业技术]