真空系统抽气性能的数值仿真分析  

Numerical simulation analysis of pumping performance of the vacuum system

作　　者：郭嘉炜 黄思[1] 李松峰 吴泰忠 GUO Jiawei;HUANG Si;LI Songfeng;WU Taizhong(School of Mechanical and Automotive Engineering,South China University of Technology,Guangzhou 510641,China;Guangdong Kenflo Pump Co.,Ltd.,Foshan 528131,China;Guangdong Provincial Key Laboratory of Pumps for Energy Conservation and Environmental Protection Equipment,Foshan 528131,China)

机构地区：[1]华南理工大学机械与汽车工程学院,广州510641 [2]广东肯富来泵业股份有限公司,广东佛山528131 [3]广东省节能环保装备用泵企业重点实验室,广东佛山528131

出　　处：《重庆理工大学学报（自然科学）》2022年第10期249-255,共7页Journal of Chongqing University of Technology：Natural Science

基　　金：国家自然科学基金项目(21878102)。

摘　　要：选取某真空系统为研究对象,该系统主要由真空泵、真空室和管道等元件组成。运用流动系统的一维仿真软件Flowmaster计算真空系统在特定工况下的抽气速率、压力、密度等参数随时间的变化规律。首先采取与理论方法、Fluent三维方法计算简单系统模型对比的方式,验证Flowmaster对真空系统计算的有效性,然后运用Flowmaster模拟计算多元件且结构复杂的真空系统。研究表明:对所研究的真空系统,T型管产生的局部阻力比管道沿程阻力对气体压降和密度影响更大,对达到特定压力指标所需时间的影响随着抽气过程逐渐减小;整个抽气过程中真空系统管道基本处于湍流状态。Flowmaster计算与理论计算、Fluent模拟结果变化趋势一致,偏差较小,表明应用流动系统尺度的一维软件,可以有效分析多元件且结构复杂的真空系统问题。In this study,a vacuum system is selected as the research object,which is mainly composed of vacuum pumps,vacuum chambers and pipelines.The one-dimensional flow simulation software Flowmaster is used to calculate temporal variations of some parameters,such as pumping rate,pressure and density under specific working conditions.Firstly,the effectiveness of Flowmaster in the calculation of vacuum system is verified by comparing with theoretical methods and three-dimensional flow software Fluent for calculating the simple system model.Then,Flowmaster is to used to calculate the complex vacuum system with multiple components.It’s shown that,for the vacuum system studied,the local resistance generated by the T-tube has a greater impact on pressure drop and density of the gas than the resistance along the pipeline,and its impact on the time reaching a specific pressure gradually decreases during the pumping process.Besides,during the whole pumping process,the vacuum pipe is almost in a turbulent state.In conclusion,the changing trend of Flowmaster is consistent with the results of both theoretical calculation and Fluent simulations,and the deviations are small,indicating that the one-dimensional software at the scale of the flow system can be used to analyze the vacuum systems with multiple components and complex structures.

关 键 词：真空系统 抽气性能 Flowmaster 一维仿真 

分 类 号：O368[理学—流体力学]